溶剂对<strong>FTO</strong>薄膜的结构和光电性能的影响

doi:10.11901/1005.3093.2018.421

材料研究学报

2019, Vol. 33

Issue (4): 277-283 DOI: 10.11901/1005.3093.2018.421

本期目录 | 过刊浏览

溶剂对FTO薄膜的结构和光电性能的影响

付晨,王立坤,邱茹蒙,王贵,蔡文豪,杨静凯,赵洪力(

)

燕山大学材料科学与工程学院亚稳材料制备技术与科学国家重点实验室秦皇岛 066004

Effect of Solvents on Structure and Photoelectric Properties of FTO Thin Films

Chen FU,Likun WANG,Rumeng QIU,Gui WANG,Wenhao CAI,Jingkai YANG,Hongli ZHAO(

)

School of Materials Science and Engineering, Yanshan University, State Key Laboratory of Metastable Materials Science and Technology, Qinhuangdao 066004, China

引用本文:

付晨,王立坤,邱茹蒙,王贵,蔡文豪,杨静凯,赵洪力. 溶剂对FTO薄膜的结构和光电性能的影响[J]. 材料研究学报, 2019, 33(4): 277-283.
Chen FU, Likun WANG, Rumeng QIU, Gui WANG, Wenhao CAI, Jingkai YANG, Hongli ZHAO. Effect of Solvents on Structure and Photoelectric Properties of FTO Thin Films[J]. Chinese Journal of Materials Research, 2019, 33(4): 277-283.

全文: PDF(6009 KB) HTML

摘要:

采用喷雾热解法(SPD)，分别使用甲醇、乙醇、异丙醇、正丁醇和去离子水作为溶剂制备F掺杂的SnO₂(FTO)透明导电薄膜，使用X射线衍射仪、扫描电子显微镜、四点探针电阻仪、霍尔效应仪和紫外可见分光光度计等手段对薄膜进行测试和表征，研究了溶剂对FTO薄膜结构、形貌和光电性能的影响，研究了溶剂对FTO薄膜结构与光电性能的影响。结果表明：FTO薄膜具有四方相金红石结构；使用不同溶剂制备的薄膜，其表面形貌和颗粒尺寸明显不同；使用甲醇为溶剂制备的FTO薄膜呈现饱满的金字塔状，晶粒尺寸均匀，结构致密，具有最佳的综合光学和电学性能，其电阻率可达4.43×10^-4 Ω·cm，载流子浓度为9.922×10²⁰ cm^-3，品质因数为1.646×10^-2 Ω^-1，可见光区透射比均大于75%。

关键词 ：无机非金属材料, FTO薄膜, 喷雾热解, 溶剂, 光学性能, 电学性能

Abstract：

Transparent conductive thin films of fluorine Transparent conductive thin films of fluorine doped tin oxide (FTO) were prepared via spray-pyrolysis (SPD) process using with methanol, ethanol, isopropanol, n-butanol and deionized water as solvents respectively. The films were tested and characterized by X-ray diffraction, scanning electron microscope, four-point probe resistance meter, Hall effect meter and UV-visible spectrophotometer. The effects of solvent on the structure, morphology and photoelectric properties of FTO films were investigated. The results show that when the solvents were with different solvents, the prepared FTO thin films showed the same crystallographic, i.e. a tetrahedral rutile structure, and however their surface morphology and particle size were significantly different. Among others, the FTO thin films prepared with methanol as the solvent showed a dense and full pyramid-like structure al shape, with uniform grain size, compact structure, and the best comprehensive optical and electrical properties, namely, the best resistivity of the film can reach 4.43×10^-4 Ω·cm, the carrier concentration is 9.922×10²⁰ cm^-3, the figure of merit of the film is 1.63×10^-2 Ω^-1, and the visible light transmittance is greater than 75%.

Key words： inorganic non-metallic materials FTO thin film spray pyrolysis solvent optical properties electrical properties

收稿日期: 2018-07-02

ZTFLH:

TB43

基金资助:国家重点研发计划(2016YFB0303902);河北省重点基础研究项目(17961109D);国家自然科学基金(51602278);河北省自然科学基金(E2016203149);河北省教育厅青年拔尖人才计划(BJ2018004)

作者简介: 付晨，男，1993年生，硕士生

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https://www.cjmr.org/CN/10.11901/1005.3093.2018.421 或 https://www.cjmr.org/CN/Y2019/V33/I4/277

图1 喷雾热解装置的示意图

图2 使用不同溶剂制备的FTO薄膜的XRD谱

图3 使用不同溶剂制备的FTO薄膜的织构因子和择优取向度

图4 使用不同溶剂制备的FTO薄膜的SEM照片

图5 使用不同溶剂制备的FTO薄膜颗粒的平均尺寸

图6 溶剂对FTO薄膜透射比的影响

表1 使用不同溶剂制备的FTO薄膜的参数

图7 溶剂对FTO薄膜光学带隙的影响

图8 溶剂对FTO薄膜的方块电阻和电阻率的影响

图9 溶剂对FTO薄膜载流子浓度和迁移率的影响

图10 溶剂对FTO薄膜的晶粒尺寸和平均自由程的影响

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