材料研究学报  2013, Vol. 27 Issue (3): 312-316

研究论文 本期目录 | 过刊浏览 |

TiC0.81N0.48和TiC0.61N0.44O0.15涂层的热稳定性能*

朱丽慧1 张雨萌1 彭 笑1 Peter Leicht 2 刘一雄2

1. 上海大学材料科学与工程学院 上海 200072 2. 美国肯纳金属公司 宾夕法尼亚州 拉特罗布 15650

Thermal Stability of TiC0.81N0.48 and TiC0.61N0.44O0.15 Coatings

ZHU Lihui1** ZHANG Yumeng 1 PENG Xiao1 Peter Leicht 2 LIU Yixiong 2

1. School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China 2. Kennametal Inc., Latrobe, PA 15650, USA

朱丽慧, 张雨萌, 彭笑, Peter Leicht , 刘一雄. TiC_0.81N_0.48和TiC_0.61N_0.44O_0.15涂层的热稳定性能*[J]. 材料研究学报, 2013, 27(3): 312-316.
. Thermal Stability of TiC_0.81N_0.48 and TiC_0.61N_0.44O_0.15 Coatings[J]. Chinese Journal of Materials Research, 2013, 27(3): 312-316.

摘要 参考文献 相关文章 Metrics 全文: PDF(848 KB)   摘要: 用中温化学气相沉积工艺制备TiC0.81N0.48和TiC0.61N0.44O0.15涂层, 用显微维氏硬度计测定TiCN和TiCNO涂层的硬度, 用X射线衍射仪和激光拉曼光谱仪分析涂层的结构, 研究了TiCN和TiCNO涂层在700℃真空退火后的组织结构转变对硬度的影响。结果表明: 真空退火后TiC0.81N0.48和TiC0.61N0.44O0.15涂层的硬度先下降, 然后趋于稳定。TiC0.81N0.48和TiC0.61N0.44O0.15涂层在700 ℃真空退火时, C原子从TiCN晶格析出后先形成sp3C; 随着退火时间的延长, sp3C逐渐向sp2C转变; 随后sp2C团簇增加, 无序程度降低, TiCN逐渐分解为TiC和TiN相。硬度的降低, 是由于涂层内缺陷密度的减少使应力释放, 还与高温下TiC0.81N0.48和TiC0.61N0.44O0.15涂层组织结构的转变, 特别是sp3C和sp2C的形成有关。与TiC0.61N0.44O0.15涂层相比, 在700℃真空退火时TiC0.81N0.48涂层组织转变的进程加快, 热稳定性能较差。 关键词 ： 材料失效与保护,  TiCN涂层,  热稳定性,  相转变,  硬度     Abstract：TiC0.81N0.48 coating and TiC0.61N0.44O0.15 coating deposited by medium temperature chemical vapor deposition, were characterized by Vickers hardness tester, X-ray diffraction (XRD) and confocal Raman spectrometer, and the effect of microstructure transformation on the hardness was investigated. Results show that the hardness of TiC0.81N0.48 and TiC0.61N0.44O0.15 coatings declines after annealing at 700 ℃ in vacuum, and then tends to be stable. At the beginning of the annealing, some C atoms escape from the lattice of TiCN, resulting in the formation of sp3C. As the annealing time prolongs, sp3C transforms to sp2C gradually. Thereafter the clustering of sp2C increases, the disorder degree decreases, and TiCN decomposes into TiC and TiN. The decrease of hardness is related with the release of residual stress due to the defect annihilation. Besides, the microstructure transformation especially the formation of sp3C and sp2C decreases the hardness of coatings. Compared with TiC0.61N0.44O0.15, the microstructure transformation takes places earlier in TiC0.81N0.48 coating, which exhibits worse thermal stability. Key words： materials failure and protection    TiCN coatings    thermal stability    microstructure transformation    hardness 收稿日期: 2013-03-11      ZTFLH:  TG174   基金资助:* 美国肯纳公司资助项目 服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 44.8K 链接本文: https://www.cjmr.org/CN/      或      https://www.cjmr.org/CN/Y2013/V27/I3/312 1 T. Sadahiro, S. Yamaya, K. Shibuki, N. Ujiie, Wear resistant coating of cemented carbides and high speed steels by chemical vapour deposition, Wear, 48, 291(1978) 2 S. Ruppi, A. Larsson, Deposition, microstructure, and properties of nanocrystalline Ti(C, O, N) coatings, Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 21(1), 66(2003) 3 J. H. Hsieh, C. Li, W. Wu, A. L. K. 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