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| Fe/Si薄膜中硅化物的形成和氧化 |
| 张晋敏; 谢泉;梁艳;曾武贤 |
| 贵州大学电子科学与信息技术学院；贵州大学新型光电子材料与应用技术研究所 |
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| ZHANG Jin-min |
| 贵州大学电子科学与信息技术学院；贵州大学新型光电子材料与应用技术研究所 |
引用本文:
张晋敏; 谢泉; 梁艳; 曾武贤 . Fe/Si薄膜中硅化物的形成和氧化[J]. 材料研究学报, 2008, 22(3): 297-302.
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[J]. Chin J Mater Res, 2008, 22(3): 297-302.
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