Ru-Cr下底层成分对Co-W磁性薄膜结构和磁性能的影响<sup>*</sup>

doi:10.11901/1005.3093.2013.612

材料研究学报

2014, Vol. 28

Issue (7): 515-520 DOI: 10.11901/1005.3093.2013.612

本期目录 | 过刊浏览

Ru-Cr下底层成分对Co-W磁性薄膜结构和磁性能的影响^*

王建军^1,²(

),高崇²,刘春明^1,²

1. 东北大学材料各向异性与织构教育部重点实验室沈阳 110819
2. 东北大学材料与冶金学院沈阳 110819

Influence of Composition of Ru-Cr Buffer Layers on Crystal Structure and Magnetic Property of Co-W Magnetic Films

Jianjun WANG^1,^2,^**(

),Chong GAO²,Chunming LIU^1,²

1. Key Laboratory for Anisotropy and Texture of Materials, Northeastern University, Shenyang 110819
2. School of Materials and Metallurgy, Northeastern University, Shenyang 110819

引用本文:

王建军,高崇,刘春明. Ru-Cr下底层成分对Co-W磁性薄膜结构和磁性能的影响^*[J]. 材料研究学报, 2014, 28(7): 515-520.
Jianjun WANG, Chong GAO, Chunming LIU. Influence of Composition of Ru-Cr Buffer Layers on Crystal Structure and Magnetic Property of Co-W Magnetic Films[J]. Chinese Journal of Materials Research, 2014, 28(7): 515-520.

全文: PDF(874 KB) HTML

摘要:

用直流磁控溅射在300℃不同Ru-x% Cr (x=0, 20, 40)下底层沉积制备了Co-15% W(原子分数)磁性薄膜。用XRD表征了薄膜的精细晶体结构, 分析了Co-W和Ru-Cr层的取向关系, 估算了薄膜层的晶格常数、c轴分散角、fcc/hcp体积百分比和堆垛层错密度值。结果表明, 随着Ru-Cr下底层Cr成分的增加Co-W磁性层和Ru-Cr下底层间的晶格错配度降低, hcp-Co的晶格常数比c/a随之减小。磁性能测试结果证实, 由于Co-W磁性层中晶格常数比c/a的减小磁性层的磁各向异性能显著提高。

关键词 ：金属材料, Co-W磁性薄膜, XRD, 晶体结构, 磁各向异性能

Abstract：

Thin films of magnetic alloy Co-15% W (atomic fraction) were deposited by DC magnetron sputtering on buffer layers of alloys Ru - x% Cr (atomic fraction, x=0, 20, 40) at 300℃, which were pre-deposited on a substrate of MgO(111) by the same process. The crystallographic structure of the films was examined by X-ray diffraction in terms of the epitaxial relationship between Co-W and Ru-Cr, the lattice parameters, the mosaic spread, the volume ratio of face centered cubic phase to hexagonal close-packed phase and the stacking fault densities. It was found that the lattice constant ratio c/a of hcp Co-W reduced with increasing Cr content x of Ru-Cr films due to the reduction of lattice misfit between Co-W magnetic films and Ru-Cr buffer layers. A clear correlation between the crystallographic structure and the magnetic anisotropy energy (MAE) of Co-W was confirmed, that is, the MAE was significantly enhanced with the reduction of c/a.

Key words： metallic materials Co-W magnetic film X-ray diffraction crystallographic structure magnetic anisotropy energy

收稿日期: 2013-08-26

基金资助:* 国家自然科学基金青年基金50901016、中央高校基本科研业务费N090402005和教育部留学回国人员启动基金资助项目。

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图1 不同成分RuCr下底层上沉积的Co85W15薄膜(膜厚25 nm)和不同膜厚Co85W15薄膜的X射线衍射图谱

图2 典型Co85W15/Ru100-xCrx (x=20, 40)薄膜的w扫描结果(摇摆曲线) 、Co{101} 和Ru {101}的f扫描结果

图3 Co85W15/Ru100-xCrx (x =0, 20, 40)薄膜fcc/hcp比随膜厚的变化, 内插图为Co85W15/Ru80Cr20薄膜中fcc-Co(111)和hcp- Co(101)峰的衍射图谱对照

图4 Co85W15/ Ru100-xCrx (x=20, 40)薄膜堆垛层错与膜厚的关系

图5 Co85W15薄膜晶格常数比与膜厚的关系曲线

图6 Co-W磁性层和Ru-Cr下底层间的a轴错配度

图7 Co-W薄膜在外加磁场下的磁化(a) 磁化示意图; (b) 典型的磁化回线(Co85W15/Ru80Cr20 (50 nm) 薄膜)

图8 Co85W15/ Ru100-xCrx (x=0, 20, 40)薄膜的磁各向异性常数Ku

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