<strong>Al/Ti</strong>摩尔比对<strong>(CrTiAl)N</strong>硬质膜相结构和硬度的影响

doi:10.11901/1005.3093.2021.270

材料研究学报

2022, Vol. 36

Issue (1): 55-61 DOI: 10.11901/1005.3093.2021.270

研究论文

本期目录 | 过刊浏览

Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响

张钧¹^,²(

), 彭立静¹^,², 王宇¹^,², 王晓阳¹^,², 王楠¹^,², 王美涵¹^,²

^1.沈阳大学机械工程学院沈阳 110044
^2.辽宁省多组硬质膜研究及应用重点实验室沈阳 110044

Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films

ZHANG Jun¹^,²(

), PENG Lijing¹^,², WANG Yu¹^,², WANG Xiaoyang¹^,², WANG Nan¹^,², WANG Meihan¹^,²

^1.College of Mechanical Engineering, Shenyang University, Shenyang 110044, China
^2.Key Laboratory of Research and Application of Multiple Hard Films of Liaoning Province, Shenyang 110044, China

引用本文:

张钧, 彭立静, 王宇, 王晓阳, 王楠, 王美涵. Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响[J]. 材料研究学报, 2022, 36(1): 55-61.
Jun ZHANG, Lijing PENG, Yu WANG, Xiaoyang WANG, Nan WANG, Meihan WANG. Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films[J]. Chinese Journal of Materials Research, 2022, 36(1): 55-61.

全文: PDF(10236 KB) HTML

摘要:

采用多弧离子镀技术，设计沉积工艺和调整阴极弧源靶组合以及对应的弧源电流，制备出以CrN为基形貌和厚度相同、Al/Ti摩尔比不同的系列(CrTiAl)N硬质膜。测试膜的成分、组织形貌、相组成和表面硬度，研究了 Al/Ti摩尔比对其相结构和硬度的影响。结果表明：不同Al/Ti摩尔比的(CrTiAl)N膜其相组成相同，都呈现(200)和(111)晶面择优生长。随着膜层的Al/Ti摩尔比从0.38提高到0.85，其硬度表现出规律性的变化。Al/Ti摩尔比为0.49的(CrTiAl)N膜硬度最高(达到HV4200)，Al/Ti摩尔比为0.85时硬度降到HV2600。在膜层组织形貌、膜层厚度以及CrN含量基本不变的条件下，Al/Ti摩尔比直接影响膜层的硬度并呈现出非单调关系。在较大的Al/Ti摩尔比范围内(CrTiAl)N膜层的相结构不变，均为置换式面心立方固溶体。优化Al/Ti摩尔比，可使(CrTiAl)N膜的硬度显著高于(CrTi)N膜而具有超硬性。

关键词 ：金属材料, （CrTiAl）N硬质膜, 多弧离子镀, Al/Ti摩尔比, 硬度, 相结构

Abstract：

A series of (CrTiAl)N hard films with the same morphology and thickness but different Al/Ti molar ratio were prepared via multi-arc ion plating technology with desired processing parameters while varying the combination mode of cathode arc source and target. The chemical composition, microstructure, phase constituent and surface hardness of the films were characterized. Meanwhile the effect of Al/Ti molar ratio on the phase structure and hardness of the films were investigated. The results show that：the (CrTiAl)N films with different Al/Ti molar ratios present the same phase constituents with preferred growth orientations (200) and (111). With the increase of Al/Ti molar ratio from 0.38 to 0.85, the hardness of the film shows a regular change. The hardness of (CrTiAl)N films with Al/Ti molar ratio of 0.49 is the highest, reaching HV4200, however when the Al/Ti molar ratio is 0.85, the hardness decreases to HV2600. The Al/Ti molar ratio has a direct effect on the hardness of the film and shows a non-monotonic relationship when the microstructure, thickness and CrN content of the films are basically unchanged. In the larger Al/Ti molar ratio range, the phase structure of (CrTiAl)N films is unchanged and all of them are displacement-centered cubic solid solutions. The hardness of (CrTiAl)N films is significantly higher than that of (CrTiN) films and which can possess super hardness by optimizing the molar ratio of Al/Ti.

Key words： metallic materials (CrTiAl)N hard film multi-arc ion plating Al/Ti molar ratio hardness phase structure

收稿日期: 2021-04-29

ZTFLH:

TG430.40

基金资助:辽宁省高等学校创新人才支持计划(LR2019044)

作者简介: 张钧，男，1966年生，博士

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https://www.cjmr.org/CN/10.11901/1005.3093.2021.270 或 https://www.cjmr.org/CN/Y2022/V36/I1/55

表1 (CrTiAl)N和(TiCr)N硬质膜的沉积工艺参数

图1 沉积时间和氮气、氩气流量的控制

图2 (CrTiAl)N膜和(TiCr)N膜的表面和断面形貌

图3 (CrTiAl)N膜的Al/Ti摩尔比以及对应的(归一化后)金属元素含量

图4 (CrTiAl)N膜的XRD衍射谱和CrN、TiN的标准衍射谱

图5 (CrTiAl)N膜的实测晶格常数与根据VEGARD定律计算结果的对比

图6 Al/Ti摩尔比对(CrTiAl)N膜硬度的影响

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