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掺氮纳米金刚石膜的制备和性能 |
王延平,王兵,熊鹰,周亮 |
西南科技大学材料科学与工程学院 绵阳 21010 |
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Preparation and Property of Nanocrystalline Diamond Film oped with N |
WANG Yanping,WANG Bing,XIONG Ying,HOU Liang |
School of Materials Science and Engineering, Southwest University of Science and Technology, Mianyang 621010 |
引用本文:
王延平 王兵 熊鹰 周亮. 掺氮纳米金刚石膜的制备和性能[J]. 材料研究学报, 2011, 25(2): 147-150.
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Preparation and Property of Nanocrystalline Diamond Film oped with N[J]. Chin J Mater Res, 2011, 25(2): 147-150.
1 S.Bhattacharyya, O.Auciello, J.Birrell, J.A.Curtiss, A.N.Goyette, D.M.Gruen, A.R.Krauss, J.Schlueter, A.Sumant, P.Zapol, Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films, Applied Physics Letters, 79(10), 1441(2001) 2 ZHOU Jian, FU Wenbin, YUAN Runzhang, MPCVD Diamond films (Beijing, The Press of Chian Building Materials Industry, 2002) p.28(周健, 傅文斌, 袁润章, 微波等离子体化学气相沉积金刚石膜 (北京, 中国建材工业出版社, 2002) p.28) 3 James Birrell.Highly conductive ultranocrystalline diamond thin films via nitrogen incorporation, PHD, University of Illinois at Urbana-Champaign, 20034 James Birrell, O.Auciello, J.M.Gibson, D.M.Gruen, J.A.Carlisle. Bonding structure in nitrogen doped ultrananocrystalline diamond, Journal of Applied Physics, 3(1), 5606(2003)5 O.Kano, S.Koizumi, S.Ravi, P.Silva, G.A.J.Amaratunga, Low-threshold cold cathodes made of nitrogen-doped chemical-vapour-deposited diamond, Nature, 140, 381(1996) 6 James Birrell, J.A.Carlisle, O.Auciello, D.M.Gruen, J.M.Gibson, Morphology and electronic structure in nitrogen-doped ultrananocrystalline diamond, Applied Physics Letters, 81(12), 2235(2002)7 SUN Lei, MAN Weidong, WANG Jianhua, XIE Peng, XIONG Liwei, LI Yuan, Development of synthesizing CVD diamond films for semiconductor materials, Vacuum & Cryogenics, 14(3),134(2008)(孙蕾, 满卫东, 汪建华, 谢鹏, 熊礼威, 李远, CVD金刚石薄膜半导体材料的研究进展, 真空与低温, 14(3), 134(2008)) 8 C.Popov, G.Favaro, W.Kulisch, J.P.Reithmaier, Influence of the nucleation density on the structure and mechanical properties of ultrananocrystalline diamond films, Diamond and Related Materials, 18(2-3), 151(2009) 9 Minseo Park. Nitrogen Doping Optical Characterization and Electron Emission Study of Diamond, PHD, North Carolina State University(1998)10 A.N.Goyette, J.E.Lawler, L.W.Anderson, D.M.Gruen, T.G.McCauley, D.Zhou, A.R.Krauss, Spectroscopic determination of carbon dimer densities in Ar–H2–CH4 and Ar–H2–C60 plasmas, Journal of Applied Physics, 3(1), 1975(1998)11 Andrea C. Ferrari, John Robertson, Raman spectroscopy in carbons: from Nanotubes ti Diamond (Beijing, The Press of Chemical Industry, 2007) p.245(安德里亚•卡罗•费拉里, 约翰•罗伯逊, 碳材料的拉曼光谱: 从纳米管到金刚石 (北京, 化学工业出版社, 2007) p.245) 12 A.C.Ferrari, J.Robertson, Origin of the 1150 cm−1 Raman mode in nanocrystalline diamond, Physical Review B, 63(12), 1-4(2001)13 Isao Sakaguchi, Mikka N.Gamo, Yuko Kikuchi, Eiji Yasu,Hajime Haneda,Toshimitsu Suzuki and Toshihiro Ando.Sulfur: A donor dopant for n-type diamond semiconductors, Physical Review B, 5(15), 2139(1999) |
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