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溶胶粒径对氧化硅减反射膜结构和光学性能的影响 |
倪志龙1, 王彪1,2, 杨晔1, 宋伟杰1 |
1.中国科学院宁波材料技术与工程研究所 宁波 315201
2.中国科学院上海硅酸盐研究所 上海 200050 |
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Effect of Colloid Particle Sizes on Microstructure and Optical Properties of the Silica Antireflective Coatings |
NI Zhilong1, WANG Biao1,2, YANG Ye1, SONG Weijie1 |
1.Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201
2.Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050 |
引用本文:
倪志龙 王彪 杨晔 宋伟杰. 溶胶粒径对氧化硅减反射膜结构和光学性能的影响[J]. 材料研究学报, 2010, 24(5): 478-482.
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Effect of Colloid Particle Sizes on Microstructure and Optical Properties of the Silica Antireflective Coatings[J]. Chin J Mater Res, 2010, 24(5): 478-482.
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