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| 磁控溅射制备SiC薄膜的高温热稳定性 |
| 祝元坤1; 朱嘉琦1; 韩杰才1; 梁军1; 张元纯2 |
1.哈尔滨工业大学复合材料研究所 哈尔滨 150001
2.中国汽车工业工程公司 天津 300190 |
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| High–temperature thermal stability research on SiC thin films by magnetron sputtering |
| ZHU Yuankun1; ZHU Jiaqi1; HAN Jiecai1; LIANG Jun1; ZHANG Yuanchun2 |
1.Center for Composite Materials; Harbin Institute of Technology; Harbin 150001
2.China Automobile Industry Engineering Cooperation; Tianjin 300190 |
引用本文:
祝元坤 朱嘉琦 韩杰才 梁军 张元纯. 磁控溅射制备SiC薄膜的高温热稳定性[J]. 材料研究学报, 2009, 23(4): 410-414.
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High–temperature thermal stability research on SiC thin films by magnetron sputtering[J]. Chin J Mater Res, 2009, 23(4): 410-414.
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