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| 离子轰击能量对ZrN/TiAlN纳米多层膜性能的影响 |
| 曹猛;李强;邓湘云;李德军 |
| 天津师范大学物理与电子信息学院 天津300387 |
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引用本文:
曹猛;李强;邓湘云;李德军. 离子轰击能量对ZrN/TiAlN纳米多层膜性能的影响[J]. 材料研究学报, 2007, 21(6): 627-631.
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