纳米多孔铜钛合金的制备及其超级电容器性能*

doi:10.11901/1005.3093.2015.12.913

材料研究学报

2015, Vol. 29

Issue (12): 913-920 DOI: 10.11901/1005.3093.2015.12.913

本期目录 | 过刊浏览

纳米多孔铜钛合金的制备及其超级电容器性能*

刘洁^1,^2,³,刘旭燕^2,³,刘芳^2,³,王飞^1,^2,³,潘登^2,³(

)

1. 上海理工大学机械工程学院上海 200093
2. 上海理工大学材料科学与工程学院上海 200093
3. 上海理工大学上海市金属基先进电力材料实验室上海 200093

Fabrication of a Three-dimensional Nanoporous Cu-Ti Alloy with Excellent Electrochemical Capacitance Performance

Jie LIU^1,^2,³,Xuyan LIU^2,³,Fang LIU^2,³,Fei WANG^1,^2,³,Deng PAN^2,^3,^**(

)

1. School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
2. School of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
3. Metal Based Advanced Electric Power Materials Laboratory, University of Shanghai for Science and Technology, Shanghai 200093, China

引用本文:

刘洁,刘旭燕,刘芳,王飞,潘登. 纳米多孔铜钛合金的制备及其超级电容器性能*[J]. 材料研究学报, 2015, 29(12): 913-920.
Jie LIU, Xuyan LIU, Fang LIU, Fei WANG, Deng PAN. Fabrication of a Three-dimensional Nanoporous Cu-Ti Alloy with Excellent Electrochemical Capacitance Performance[J]. Chinese Journal of Materials Research, 2015, 29(12): 913-920.

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摘要:

采用磁控溅射法和脱合金法相结合的方法制备了纳米多孔铜钛合金。以原子比为40∶60的Cu-Ti合金靶材为原料用磁控溅射方法制备了厚度为720 nm的铜钛合金薄膜(Cu₃₅Ti₆₅), 并将此薄膜置于0.13 mol/L的氢氟酸溶液中用脱合金方法腐蚀得到了纳米多孔铜钛合金薄膜, 将制备好的铜钛合金薄膜作为三电极测试系统中的负极材料, 以对其电容性能进行测试。本文测试和计算了这种纳米多孔铜钛薄膜电极在1 mol/L Na₂SO₄电解液中的比电容。结果表明, 电极在这种中性溶液中的电化学性能良好, 比容量为8.96 mFcm^-2, 比现有的纳米多孔铜电极有很大的提高。对NPCu/Ti电极的循环充放电性能的测试结果表明, 该电极具有优良的循环稳定性能, 比现有的纳米多孔铜电极有明显的改善。这种改善与电极材料的多孔结构有关。

关键词 ：金属材料, 纳米多孔铜钛, 磁控溅射, 脱合金, 电化学容量, 超级电容器

Abstract：

Thin film of nanoporous Cu-Ti alloy as a promising electrode material for electrochemical capacitors was prepared by a two-step process, i.e. a thin film of Cu₃₅Ti₆₅was firstly deposited on silicon substrate by magnetron sputtering process with Cu₄₀Ti₆₀ alloy as target , and then the sputtered film of Cu₃₅Ti₆₅ alloy was dealloyed in 0.13 mol/L HF solution for 12 h to prepair the isolated thin film of nanoporous Cu-Ti alloy. Electrodes made of the nanoporous Cu-Ti alloy exhibited excellent electrochemical capacitance performance with a specific capacitance of 8.96 mFcm^-2 in 1 mol/L Na₂SO₄ solution. Furthermore, the nanoporous Cu-Ti alloy electrode showed remarkable chemical stability by cyclically charging and discharging. The excellent electrochemical performance of the nanoporous Cu-Ti alloy can be ascribed to the high specific surface area of the nanoporous structure.

Key words： metal materials nanoporous Cu-Ti magnetron sputtering dealloying electrochemical capacitance electrochemical capacitor

收稿日期: 2015-05-12

基金资助:* 上海市教委创新项目14YZ082和上海市科委自然科学基金14ZR1428100资助项目

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表1 不同薄膜样品的EDAX能谱元素成分分析

图1 不同薄膜样品的SEM图像

图2 不同薄膜样品的EDAX图谱

图3 不同薄膜样品的XRD物相分析

表2 脱合金8 h和12 h的NPCu/Ti薄膜在不同扫描速率下测得的CV曲线计算的比电容值

表3 不同纳米多孔结构电极的比容量比较

图4 不同条件下制备的纳米多孔铜钛合金薄膜在1 mol/L Na2SO4溶液中的CV曲线

图5 不同条件下制备的纳米多孔铜钛合金薄膜在1 M Na2SO4溶液中的充放电曲线

表4 脱合金8 h和12 h的NPCu/Ti薄膜在不同电流密度下的充放电曲线计算的比电容值

图6 脱合金8 h和12 h的NPCu/Ti薄膜在1 mol/L Na2SO4溶液中的EIS图谱及其拟合电路图

表5 脱合金8 h和12 h的NPCu/Ti薄膜在1 mol/L Na2SO4溶液中的电化学阻抗谱拟合结果

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