Effect of Nitrogen Flow Ratio on Microstructure and Property of High-Entropy Alloy Films (CoCrFeNi)Nx Prepared by Magnetron Sputtering

doi:10.11901/1005.3093.2018.374

Chinese Journal of Materials Research

2019, Vol. 33

Issue (3): 185-190 DOI: 10.11901/1005.3093.2018.374

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Effect of Nitrogen Flow Ratio on Microstructure and Property of High-Entropy Alloy Films (CoCrFeNi)N_x Prepared by Magnetron Sputtering

Xiaodong LIU¹,Shuyong TAN²,Wenyi HUO¹,Xuhai ZHANG¹,Qiyue SHAO¹,Feng FANG¹(

)

1. Jiangsu Key Laboratory of Advanced Metallic Materials, Southeast University, Nanjing, 211189, China
2. School of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing 211167, China

Cite this article:

Xiaodong LIU,Shuyong TAN,Wenyi HUO,Xuhai ZHANG,Qiyue SHAO,Feng FANG. Effect of Nitrogen Flow Ratio on Microstructure and Property of High-Entropy Alloy Films (CoCrFeNi)N_x Prepared by Magnetron Sputtering. Chinese Journal of Materials Research, 2019, 33(3): 185-190.

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Abstract

High-entropy alloy films of (CoCrFeNi)N_x were prepared by direct current magnetron sputtering. The effect of nitrogen flow ratio on the microstructure, mechanical-, electrical- and magnetic- properties of the films were investigated. The results show that all dense (CoCrFeNi)N_x films prepared with different nitrogen flow ratio all consist of simple single face-centered cubic phase with (200) preferred orientation. With the increase of nitrogen flow ratio from 0 to 30%, both the hardness and elasticity modulus increase. The max values of the hardness and elasticity modulus are 14 GPa and 212 GPa, respectively. The resistivity of (CoCrFeNi)N_x films increases with the increasing nitrogen flow ratio, while the saturation magnetization and permeability decrease. The max value of the resistivity is 138 μΩ?cm, the highest saturation magnetization is 427.43 emu/cm³, and the coercivity remains around 0.

Key words: surface and interface in the materials magnetron sputtering (CoCrFeNi)N_x hardness resistivity magnetic properties

Received: 06 June 2018

ZTFLH:

TB43

Fund: National Natural Science Foundation of China(51371050);Industry-University Strategic Resear-ch Fund of Jiangsu Province(BY2016076-08);"Six Talent Peaks" Project of Jiangsu Province(2015-XCL-004);Key Research and Development Projects in Zhangjiagang(ZKG1614);Project Foundation of Jiangsu Key Laboratory of Advanced Structural Materials and Application Technology(ASMA201708)

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	Xiaodong LIU
	Shuyong TAN
	Wenyi HUO
	Xuhai ZHANG
	Qiyue SHAO
	Feng FANG

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https://www.cjmr.org/EN/10.11901/1005.3093.2018.374 OR https://www.cjmr.org/EN/Y2019/V33/I3/185

Table 1 Film composition with different nitrogen flow ratio (%, atomic fraction)

Fig.1 XRD diffraction pattern of (CoCrFeNi)N_xhigh entropy alloy films with different nitrogen flow ratio

Fig.2 Lattice parameter and average grain size of (CoCr-FeNi)N_x films with different nitrogen flow ratio

Fig.3 Surface images of (CoCrFeNi)N_x films with different nitrogen flow ratio (a) R_N=10%, (b) R_N=20%, (c) R_N=30%

Fig.4 AFM morphologies of (CoCrFeNi)N_x films with different nitrogen flow ratio (a) R_N=10%, (b) R_N=20%, (c) R_N=30%

Fig.5 Cross-sectional images of (CoCrFeNi)N_x films with different nitrogen flow ratio (a) R_N=10%, (b) R_N=20%, (c) R_N=30%

Fig.6 Relationship between deposition rates and nitrogen flow ratio for (CoCrFeNi)N_x films

Fig.7 Relationship between hardness and elasticity modulus and nitrogen flow ratio for (CoCrFeNi)N_x films

Fig.8 Relationship between resistivity and nitrogen flow ratio for (CoCrFeNi)N_x films

Fig.9 Relationship between magnetic properties and nitrogen flow ratio for (CoCrFeNi)N_x films

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