Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films

doi:10.11901/1005.3093.2021.270

Chinese Journal of Materials Research

2022, Vol. 36

Issue (1): 55-61 DOI: 10.11901/1005.3093.2021.270

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Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films

ZHANG Jun¹^,²(

), PENG Lijing¹^,², WANG Yu¹^,², WANG Xiaoyang¹^,², WANG Nan¹^,², WANG Meihan¹^,²

^1.College of Mechanical Engineering, Shenyang University, Shenyang 110044, China
^2.Key Laboratory of Research and Application of Multiple Hard Films of Liaoning Province, Shenyang 110044, China

Cite this article:

ZHANG Jun, PENG Lijing, WANG Yu, WANG Xiaoyang, WANG Nan, WANG Meihan. Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films. Chinese Journal of Materials Research, 2022, 36(1): 55-61.

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Abstract

A series of (CrTiAl)N hard films with the same morphology and thickness but different Al/Ti molar ratio were prepared via multi-arc ion plating technology with desired processing parameters while varying the combination mode of cathode arc source and target. The chemical composition, microstructure, phase constituent and surface hardness of the films were characterized. Meanwhile the effect of Al/Ti molar ratio on the phase structure and hardness of the films were investigated. The results show that：the (CrTiAl)N films with different Al/Ti molar ratios present the same phase constituents with preferred growth orientations (200) and (111). With the increase of Al/Ti molar ratio from 0.38 to 0.85, the hardness of the film shows a regular change. The hardness of (CrTiAl)N films with Al/Ti molar ratio of 0.49 is the highest, reaching HV4200, however when the Al/Ti molar ratio is 0.85, the hardness decreases to HV2600. The Al/Ti molar ratio has a direct effect on the hardness of the film and shows a non-monotonic relationship when the microstructure, thickness and CrN content of the films are basically unchanged. In the larger Al/Ti molar ratio range, the phase structure of (CrTiAl)N films is unchanged and all of them are displacement-centered cubic solid solutions. The hardness of (CrTiAl)N films is significantly higher than that of (CrTiN) films and which can possess super hardness by optimizing the molar ratio of Al/Ti.

Key words: metallic materials (CrTiAl)N hard film multi-arc ion plating Al/Ti molar ratio hardness phase structure

Received: 29 April 2021

ZTFLH:

TG430.40

Fund: Innovative Talent Support Program for Colleges and Universities in Liaoning Province(LR2019044)

About author: ZHANG Jun, Tel: 13998283679, E-mail: zhjun88@126.com

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	Jun ZHANG
	Lijing PENG
	Yu WANG
	Xiaoyang WANG
	Nan WANG
	Meihan WANG

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https://www.cjmr.org/EN/10.11901/1005.3093.2021.270 OR https://www.cjmr.org/EN/Y2022/V36/I1/55

Table 1 Deposition process parameters of (CrTiAl)N and (TiCr)N hard films

Fig.1 Deposition time and flow control of nitrogen and argon

Fig.2 Surface and fracture section morphology of the as-deposited (CrTiAl)N and (TiCr)N films

Fig.3 Al/Ti molar ratio and the corresponding metal content of (CrTiAl)N films (normalized)

Fig.4 XRD patterns of (CrTiAl)N films and the standard diffraction patterns of CrN and TiN films

Fig.5 Comparison between the measured lattice constants of (CrTiAl)N films and the calculated from Vegard's law

Fig.6 Effects of Al/Ti mole ratios on hardness of (CrTiAl)N films

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