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| SiO2层晶化对TiN/ SiO2纳米多层膜结构和性能的影响 |
| 魏仑;邵楠;梅芳华;李戈扬 |
| 上海交通大学金属基复合材料国家重点实验室;上海200030 |
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| The effects of crystallization of SiO2 layers on the growth structure and mechanical properties of TiN/ SiO2 nanomultilayers |
引用本文:
魏仑; 邵楠; 梅芳华; 李戈扬 . SiO2层晶化对TiN/ SiO2纳米多层膜结构和性能的影响[J]. 材料研究学报, 2005, 19(5): 479-484.
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