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| 快速热退火对原子层淀积铂纳米颗粒的影响 |
| 陈红兵, 朱宝, 陈笋, 孙清清, 丁士进, 张卫 |
| 专用集成电路与系统国家重点实验室复旦大学微电子研究院 上海 200433 |
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| Effects of Rapid Thermal Annealing on Atomic–layer–deposition Pt Nanoparticles |
| CHEN Hongbing, ZHU Bao, CHEN Sun, SUN Qingqing, DING Shijin, ZHANG Wei |
引用本文:
陈红兵 朱宝 陈笋 孙清清 丁士进 张卫. 快速热退火对原子层淀积铂纳米颗粒的影响[J]. 材料研究学报, 2012, 26(3): 255-260.
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Effects of Rapid Thermal Annealing on Atomic–layer–deposition Pt Nanoparticles[J]. Chin J Mater Res, 2012, 26(3): 255-260.
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