用丝网印刷法制备Pt电极及其性能

材料研究学报

2008, Vol. 22

Issue (5): 479-484

论文

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用丝网印刷法制备Pt电极及其性能

张海波;姜胜林;张洋洋;曾亦可

华中科技大学电子科学与技术系教育部敏感陶瓷工程研究中心

Fabrication and sintering of Pt electrode deposited by screen printing method

;

引用本文:

张海波; 姜胜林; 张洋洋; 曾亦可 . 用丝网印刷法制备Pt电极及其性能[J]. 材料研究学报, 2008, 22(5): 479-484.
, , , . Fabrication and sintering of Pt electrode deposited by screen printing method[J]. Chin J Mater Res, 2008, 22(5): 479-484.

全文: PDF(863 KB)

摘要: 采用单层和双层印刷法在氧化铝衬底上制备功能陶瓷厚膜用Pt电极, 研究了烧结温度、升温速率和电极厚度对Pt电极层的表面形貌、表面覆盖率和表面粗糙度的影响,以揭示晶粒长大、气孔生长及致密化机制. 结果表明, 在单层印刷Pt电极的烧结过程中,低温阶段残留的碳使不同温区Pt的主导扩散机制不同.双层印刷Pt电极中第一层在600℃下烧结后,印刷第二层再在1200℃下烧结具有最大表面覆盖率和最小平均粗糙度(其值约为0.82 um),同时具有最好的导电性能(方阻为0.044 Ω/□).

关键词 ：金属材料, 铂电极, 丝网印刷

Abstract：Single layer and double layer Pt bottom electrodes for functional ceramic thick films have been screen printed on alumina substrates. The effects of sintering temperature, heating rate, and thickness of the Pt electrode layer on the pattern, alumina surface coverage, and the roughness of the electrode layer have been studied. The mechanism of grain and pore growth and densification of the Pt layer is also demonstrated. The difference in activation energy and the diffusion can be due to the presence of carbon impurities, whick influences the diffusion of Pt at low temperatures. As the first layer sintered at 600℃, the double print Pt layers with sequential heat treatments at 1200℃ exhibt improved densification and surface coverage. The double print Pt layers with the minimum average roughness of 0.82μm and the smallest sheet resistivity of 0.044have been produced on alumina substrates.

Key words： Pt electrode Screen printing Sintering Activation energy Roughness

收稿日期: 2008-01-16

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