大厚度TiAlN涂层力学性能的研究*

doi:10.11901/1005.3093.2016.050

材料研究学报

2016, Vol. 30

Issue (8): 614-620 DOI: 10.11901/1005.3093.2016.050

本期目录 | 过刊浏览

大厚度TiAlN涂层力学性能的研究*

赵升升¹, 梅海娟², 程律莎¹, 丁继成², 王启民²

1. 深圳职业技术学院深圳 518055
2. 广东工业大学广州 510006

Study on Mechanical Property of TiAlN Coatings of Large Thickness

ZHAO Shengsheng^1,^**, MEI Haijuan², CHENG Lvsha¹, DING Jicheng², WANG Qimin²

1. Shenzhen Polytechnic, Shenzhen 518055, China
2. Guangdong University of Technology, Guangzhou 510006, China

引用本文:

赵升升, 梅海娟, 程律莎, 丁继成, 王启民. 大厚度TiAlN涂层力学性能的研究*[J]. 材料研究学报, 2016, 30(8): 614-620.
Shengsheng ZHAO, Haijuan MEI, Lvsha CHENG, Jicheng DING, Qimin WANG. Study on Mechanical Property of TiAlN Coatings of Large Thickness[J]. Chinese Journal of Materials Research, 2016, 30(8): 614-620.

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摘要:

采用电弧离子镀技术在不锈钢基体上制备了大厚度TiAlN涂层, 并对大厚度涂层的力学性能进行了系统的研究。结果表明: 梯度增加和循环增加N₂流量制备大厚度涂层的厚度分别达到68.79 μm和64.48 μm, 且涂层力学性能良好; 大厚度涂层残余应力沿层深的分布, 总体趋势从膜基界面向表面逐渐增大, 全膜厚平均压应力低于1 GPa, 表面硬度近2000 HV, 循环大厚度涂层的膜基结合好于梯度大厚度涂层, 而梯度大厚度涂层展现出更低的摩擦系数与磨损率。

关键词 ：材料表面与界面, TiAlN, 电弧离子镀, N2流量, 大厚度, 力学性能

Abstract：

The mechanical property of TiAlN coatings of large thickness deposited on stainless steel substrate by arc ion plating (AIP) was systematically investigated. The results indicated that the thickness of the coatings deposited by AIP with the increasing flow of N₂ by way of cycle or stepwise could reach 68.79 μm and 64.48 μm respectively, and those coatings show fairly well mechanical performance. The depth profile of residual stress of the coatings presented a general trend that the stress increased gradually from the coating/substrate interface to the top surface. The average compressive stress of the coatings is lower than 1 GPa, and its surface hardness almost reaches 2000 HV. The former coating has lower friction coefficient and wear rate, whereas the later one shows better coating/substrate adhesion.

Key words： surface and interface in the materials TiAlN arc ion plating nitrogen flow large thickness mechanical properties

收稿日期: 2016-01-20

基金资助:* 国家自然科学基金51401128和深圳市科技计划JCYJ20140508155916426资助项目

作者简介: 本文联系人: 赵升升

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图1 大厚度涂层沉积时通入的N2流量随时间的变化

图2 梯度增加(a)和循环增加(b) N2流量时大厚度涂层的截面形貌

图3 梯度增加(a)和循环增加(b) N2流量时大厚度涂层成分的沿层深分布

图4 梯度增加和循环增加N2流量时大厚度涂层残余应力的沿层深分布

图5 梯度增加(a)和循环增加(b) N2流量时大厚度涂层截面硬度的沿层深分布

图6 梯度增加(a)和循环增加(b)N2流量时大厚度涂层的洛氏压痕形貌

图7 梯度增加(a)和循环增加(b) N2流量时大厚度涂层的划痕强度

图8 梯度增加和循环增加N2流量时大厚度涂层的摩擦系数

图9 大厚度涂层经过120 min摩擦实验后的表面形貌及成分分析

图10 大厚度涂层经过120 min摩擦实验后的磨痕轮廓

1	H. Ollendorf, D. Schneider, Th. Schwarz, G. Kirchhoff, A. Mucha, A comparative study of the mechanical properties of TiN coatings using the non-destructive surface acoustic wave method, scratch test and four-point bending test, Surface and Coatings Technology, 84(1-3), 458(1996) doi: 10.1016/S0257-8972(96)02853-8
2	W. D. Munz, Titanium aluminum nitride films: A new alternative to TiN coatings, Journal of Vacuum Science and Technology, 4(6), 2717(1986) doi: 10.1116/1.573713
3	W. L. Pan, G. P. Yu, J.H.Huang, Mechanical properties of ion-plated TiN films on AISI D2 steel, Surface and Coatings Technology, 110(1-2), 111(1998) doi: 10.1016/S0257-8972(98)00680-X
4	J. Richter, Application of Vickers indentation for assessment of PVD TiN coated new nonledeburitic high-speed steels, Surface and Coatings Technology, 162, 119(2003) doi: 10.1016/S0257-8972(02)00567-4
5	T. Ikeda, H. Satoh, Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating method, Thin Solid Films, 195(1-2), 99(1991) doi: 10.1016/0040-6090(91)90262-V
6	H. Ichimura, A. Kawana, High-temperature oxidation of ion-plated TiN and TiAlN films, Journal of Materials Research, 8(5), 1093(1993)
7	J. W. Woo, J. K. Lee, S. R. Lee, D. B. Lee, High-temperature oxidation of Ti0.3Al0.2N0.5thin films deposited on a steel substrate by ion plating, Oxidation of Metals, 53, 529(2000) doi: 10.1023/A:1004685010393
8	S. Inoue, H. Uchida, Y. Yoshinga, K. Koterazawa, Oxidation behavior of (Ti1-xAlx)N films perpared by r.f. reactive sputtering, Thin Solid Films, 300(1-2), 171(1997) doi: 10.1016/S0040-6090(96)09503-X
9	H. G. Prengel, A. T. Santhanam, R. M. Penich, P. C. Jindal, K. H. Wendt, Advanced PVD-TiAlN coatings on carbide and cermet cutting tools, Surface and Coatings Technology, 94, 597(1997) doi: 10.1016/S0257-8972(97)00503-3
10	A. N. Kale, K. Ravindranath, D. C. Kothari, P. M. Raole, Tribological properties of (Ti, Al)N coatings deposited at different bias voltages using the cathodic arc technique, Surface and Coatings Technology, 145(1-3), 60(2001) doi: 10.1016/S0257-8972(01)01296-8
11	I. J. Smith, D. Gillibrand, J. S. Brooks, W. D. Münz, S. Harvey, R. Goodwin, Dry cutting performance of HSS twist drills coated with improved TiAlN, Surface and Coatings Technology, 90, 164(1997) doi: 10.1016/S0257-8972(96)03113-1
12	M. Leoni, P. Scardi, S. Rossi, L. Fedrizzi, Y. Massiani, (Ti, Cr)N and Ti/TiN PVD coatings on 304 stainless steel substrates: Texture and residual stress, Thin Solid Films, 345(2), 263(1999) doi: 10.1016/S0040-6090(98)01741-6
13	X. S. Wan, S. S. Zhao, Y. Yang, J. Gong, C. Sun, Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating, Surface and Coatings Technology, 204(11), 1800(2010) doi: 10.1016/j.surfcoat.2009.11.021
14	Q. Kong, L. Ji, H. Li, X. Liu, Y. Wang, J. Chen, H. Zhou, Influence of substrate bias voltage on the microstructure and residual stress of CrNfilms deposited by medium frequency magnetron sputtering, Materials Science and EngineeringB, 176(11), 850(2011) doi: 10.2298/PAC1104215B
15	R. Manaila, A. Devenyi, D. Biro, L. David, P. B. Barna, A. Kovacs, Multilayer TiAlN coatings with composition gradient, Surface and Coatings Technology, 151, 21(2002) doi: 10.1016/S0257-8972(01)01633-4
16	E. Vogli, W. Tillmann, U. Selvadurai-Lassl, G. Fischer, J. Herper, Influence of Ti/TiAlN-multilayer designs on their residual stresses and mechanical properties, Applied Surface Science, 257, 8550(2011) doi: 10.1016/j.apsusc.2011.05.013
17	ZHAO Shengsheng, CHENG Yu, CHANG Zhengkai, WANG Tiegang, SUN Chao, Modification of stress distribution along the thickness of (Ti, Al)N coatings and Preparation of the coatings with large thickness, ActaMetallurgicaSinica, 48(3), 277(2012)
17	(赵升升, 程毓, 常正凯, 王铁钢, 孙超, (Ti, Al)N涂层应力沿层深分布的调整及大厚度涂层的制备, 金属学报, 48(3), 277(2012)) doi: 10.3724/SP.J.1037.2011.00504
18	WU Ping, ZHOU Changchi, TANG Xinan, Preparation of wear-resistant graded metal-ceramic coating by laser-alloying, ActaMetallurgicaSinica, 30(11), 508(1994)
18	(吴萍, 周昌炽, 唐西南, 激光合金化熔覆制备耐磨陶瓷梯度涂层, 金属学报, 30(11), 508(1994)) doi: 10.1007/BF02943514
19	S. PalDey, S. C. Deevi, Properties of single layer and gradient (Ti, Al)N coatings, Materials Science Engineering, 361(1-2), 1(2003) doi: 10.1016/S0921-5093(03)00473-8
20	J. H. Huang, C. H. Ma, H. Chen, Effect of Ti interlayer on the residual stress and texture development of TiN thin films deposited by unbalanced magnetron sputtering, Surface and Coatings Technology, 201(6), 3199(2006) doi: 10.1016/j.surfcoat.2005.09.005
21	K. L. Lin, W. H. Chao, C. D. Wu, The performance and degradation behaviours of the TiAln/interlayer coatings on drills, Surface and Coatings Technology, 89(3), 279(1997) doi: 10.1016/S0257-8972(96)03015-0
22	D. Y. Wang, C. L. Chang, K. W. Wong, Y. W. Li, W. Y. Ho, Improvement of the interfacial integrity of (Ti, Al)N hard coatings deposited on high speed steel cutting tools, Surface and Coatings Technology, 120, 388(1999) doi: 10.1016/S0257-8972(99)00452-1
23	H. M. Tung, J. H. Huang, D. G.Tsai, C. F. Ai, G. P. Yu, Hardness and residual stress in nanocrystallineZrN films: Effect of bias voltage and heat treatment, Materials Science and Engineering, 500(1-2), 104(2009) doi: 10.1016/j.msea.2008.09.006
24	S. S. Zhao, H. Du, W. G. Hua, J. Gong, J. B. Li, C. Sun, The depth distribution of residual stresses in (Ti, Al)N films: Measurement and analysis, Journal of Materials Research, 22(10), 2659(2007) doi: 10.1557/JMR.2007.0363
25	W. Heinke, A. Leyland, A. Matthews, Evaluation of PVD nitride coatings, using impact, scratch and Rockwell-c adhesion test, Thin Solid Films, 270, 431(1995) doi: 10.1016/0040-6090(95)06934-8
26	S. S. Zhao, Y. Yang, J. B. Li, J. Gong, C. Sun, Effect of deposition processes on residual stress profiles along the thickness in (Ti, Al)N films, Surface and Coatings Technology, 202(21), 5185(2008) doi: 10.1016/j.surfcoat.2008.06.048
27	S. S. Zhao, S. H. Zhou, H. Y. Yu, T. C. Kuang, D. C. Zeng, Effects of TiN Films Thickness on Mechanical Properties of Stainless Steel, Chinese Journal of Vacuum Science and Technology, 36(3), 291(2016)
27	(赵升升, 周晟昊, 余红雅, 匡同春, 曾德长, 厚度对TiN薄膜力学性能的影响, 真空科学与技术学报, 36(3), 291(2016)) doi: 10.13922/j.cnki.cjovst.2016.03.08
28	B. R. Lawn, M. V. Swain, Microfracture beneath point indentations in brittle solids, Journalof Materials Science, 10(1), 113(1975) doi: 10.1007/BF00541038
29	C. B. Ponton, R. D. Rawlings, Vickers indentation fracture toughness test Part 2 Application and critical evaluation of standardised indentation toughness equations, Materials Scienceand Technology, 5(10), 961(1989)
30	Y. S. Hong, S. H. Kwon, T. G. Wang, D. I. Kim, J. Choi, K. H. Kim, Effects of Cr interlayer on mechanical and tribological properties of Cr-Al-Si-N nanocomposite coating, Transaction of Nonferrous Metals Society of China, 21, s62(2011) doi: 10.1016/S1003-6326(11)61062-5
31	SHAN Lei, CHEN Gang, CHEN Leping, CHEN Jian, On tribologicalproperties of PVD thick CrNcoating in seawater environment, Journal of Zhejiang Textile and Fashion College, 13(3), 85(2014)
31	(单磊, 陈罡, 陈乐平, 陈健, PVD大厚度CrN涂层海水环境摩擦学性能研究, 浙江纺织服装职业技术学院学报, 13(3), 85(2014)) doi: 10.3969/j.issn.1674-2346.2014.03.019

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