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| 基于磁控溅射制备纳米微晶NiOx薄膜的方法 |
| 王怀义1;2; 刁训刚1; 王武育3; 郝维昌1; 王聪1; 王天民1 |
1.北京航空航天大学理学院 北京 100083
2.北京印刷学院基础部 北京 102617
3.北京有色金属研究总院 北京 100088 |
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| A novel means for preparing nano-microcrystalline NiOx films by magnetron sputtering |
| WANG Huaiyi1;2; DIAO Xungang 1; WANG Wuyu 3; HAO Weichang 1; WANG Cong 1; WANG Tianmin 1 |
1.School of Science; Beihang University; 100083 Beijing
2.Science Education Department; Beijing Institute of Graphic Communication; 102600 Beijing
3.General Research Institute for Non-ferrous Metals; 100088 Beijing |
引用本文:
王怀义 刁训刚 王武育 郝维昌 王聪 王天民. 基于磁控溅射制备纳米微晶NiOx薄膜的方法[J]. 材料研究学报, 2009, 23(4): 426-430.
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A novel means for preparing nano-microcrystalline NiOx films by magnetron sputtering[J]. Chin J Mater Res, 2009, 23(4): 426-430.
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