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Chin J Mater Res  2008, Vol. 22 Issue (6): 657-663    DOI:
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Formation and optical properties of the large V-shaped surface pits in GaN thin film
 GAO Zhiyuan; DUAN Huantao; HAO Yue; LI Peixian; ZHANG Jinfeng
Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices;
School of Microelectronics; Xidian University; Xi'an 710071
Cite this article: 

GAO Zhiyuan; DUAN Huantao; HAO Yue; LI Peixian; ZHANG Jinfeng. Formation and optical properties of the large V-shaped surface pits in GaN thin film. Chin J Mater Res, 2008, 22(6): 657-663.

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Abstract  

Large V-shaped pits associated with the dislocation clusters are observed in the surface of GaN thin film  grown at relative high temperature or low V/III ratio in MOCVD. A model concerning the mass transport  mechanism is put forward to interpret their formation. Al atom diffused from the substrate is found to  assist in the formation of the large pit, and to prevent the dislocations connected with the pit from being  decorated by the deep level impurities or vacancy. Dislocations in GaN act as nonradiative recombination  centers, but do not contribute to the deep level luminescence.

Key words:  inorganic non-metallic materials      semiconductor materail      defects      material characterization      surface pit     
Received:  27 May 2008     
ZTFLH: 

TB321

 
  O482

 

URL: 

https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y2008/V22/I6/657

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