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| Influence of Magnetic Field Unbalance Coefficient on Properties of CrNx Coatings |
| CAO Zheng, JIANG Bailing, LU Yuanyuan, WANG Tao |
| School of Mineral Science & Engineering, Xi’an University of Technology, Xi’an 710048 |
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Cite this article:
CAO Zheng JIANG Bailing LU Yuanyuan WANG Tao. Influence of Magnetic Field Unbalance Coefficient on Properties of CrNx Coatings. Chin J Mater Res, 2011, 25(3): 313-320.
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Abstract CrNx coatings deposited by using different unbalance coefficient magnetron by DC magnetron sputtering system, were characterized. The influences of the magnetic field unbalance coefficient on the distribution of sputtered plasma and microstructure, hardness and tribological properties of CrNx coatings were investigated. The results show that multitude ions were tied near the target surface within 6 cm rang when using low unbalance coefficient magnetron (K was 2.78), but similar high density plasma does not existed at this area when using higher unbalance coefficient magnetron (K was 6.41). The thickness of CrNxcoatings increases with unbalance coefficient increases. The phase structure of the CrNx coatings deposited in three unbalanced magnetic field transformed from Cr+Cr2N to Cr+Cr2N+CrN→Cr2N+CrN with the increase of unbalance coefficient. With unbalance coefficient increasing, the flatness and compactness of the coatings were improved obviously, and the hardness was enhanced and friction coefficients were decreased.
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Received: 05 January 2011
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| Fund: Supported by National High-Tech Research and Development Program of China No.2005AA33H010. |
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