Chin J Mater Res  1998, Vol. 12 Issue (6): 604-609    DOI:

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PREDICTION OF GROWTH CONDITIONS FOR DIAMOND FILM IN CARBON-HYDROGEN-CHLORINE SYSTEM

WAN Yongzhong;ZHANG Jianyun;LIU Zhijie;ZHANG Wei;WANG Jitao(Department of Electronic Engineering; sedan University; Shanghai 200433)

WAN Yongzhong;ZHANG Jianyun;LIU Zhijie;ZHANG Wei;WANG Jitao(Department of Electronic Engineering; sedan University; Shanghai 200433). PREDICTION OF GROWTH CONDITIONS FOR DIAMOND FILM IN CARBON-HYDROGEN-CHLORINE SYSTEM. Chin J Mater Res, 1998, 12(6): 604-609.

Abstract References Related Articles Recommended Metrics Download:  PDF(488KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Ternary phase diagrams for diamond film synthesis in carbon-hydrogen-chlorine (C-H-Cl) system are first calculated. The change trend of diamond growth region with substrate temperature and chlorine addition is studied. Our theoretical calculations agree w Key words:  diamond      film      thermodynamics      halogen      Received:  25 December 1998      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1998/V12/I6/604 1 J.J.Wu, S.H.Yeh, C.T.Su, F.C.NHong, Appl.Phys.Lett., 68(23). 3254(1996) 2 F.C-N Hong, G.T.Liang, J.J.Wu, D.Chang, J.C.Hsieh, Appl.Phys.Lett., 63(23). 3149(1993) 3 C.PaU, C.J.Chu, J.L.Margrave, R.H.Hauge, J.Elwtrochem.Soc., 41(11), 3246(1994) 4 B.J-Bai, C.J.Chu, D.E.Patterson, R.H.Hauge, J.L.Margrave, J.Mater.the., 8(2)' 233(1993) 5 M,Frenklach, R.Kematwh, D.Huang, W.Howard, K.E.Spear, J.Appl.Phys., 66(1), 395(1989) 6 J.T.Wan, J.o.Carlsson, Surfase and Coating Technology 43/44, 1(1990) 7 J.T.Wan, PJ.Zheng, Q.H.Yang, H.Wang, in: Diamond Materiais, PV95-4, edited by K.V.Ravi,J.PDismkes, (The Electrocheforcal Society, Inc., Pennington, NJ, 1995) p.13 8 J.T.Wang, Z.Q.Huang, Q.H.Yang, D.W.Zliang, Y.Z.Wan, in: Prm. of 13th International Conf on CVD,PV96-8, edited by T.M.Besmann, M.D.Allendorf McD.Robinson, R.K.Ulrich, (Tbe Electrochem. Soc.,Inc., Penningtn, NJ, 1996) p.728 9 Y.Z.Wan, D.W.Zhang, Z.J.Liu, J.T.Wang, Appl.Phy8.A, 67, 225(1998) 10 J.C.Angus, C.C.HayInan, Science, 241, 913(1988) [1] LIU Mingzhu, FAN Rao, ZHANG Xiaoyu, MA Zeyuan, LIANG Chengyang, CAO Ying, GENG Shitong, LI Ling. Effect of Photoanode Film Thickness of SnO2 as Scattering Layer on the Photovoltaic Performance of Quantum Dot Dye-sensitized Solar Cells[J]. 材料研究学报, 2023, 37(7): 554-560. [2] XU Yang, LI Yanrui, LIU Baosheng, LIU Wen, ZHANG Shaohua, WEI Yinghui. Precipitation of Second Phase in Non-oriented Silicon Steel[J]. 材料研究学报, 2023, 37(1): 47-54. [3] YIN Jie, HU Yuntao, LIU Hui, YANG Yifei, WANG Yifeng. Constructing Polyaniline/Alginate Film by Electrodeposition and Its Electrochemical Properties[J]. 材料研究学报, 2022, 36(4): 314-320. [4] SHAO Siwu, ZHENG Yuting, AN Kang, HUANG Yabo, CHEN Liangxian, LIU Jinlong, WEI Junjun, LI Chengming. Progress on Application of Bias Technology for Preparation of Diamond Films[J]. 材料研究学报, 2022, 36(3): 161-174. [5] ZHU Haiyong, ZHANG Wei. Effect of Mn Doping and Niobium Oxide Seed Layer on Electrical Properties of Potassium Sodium Niobate Thin Films[J]. 材料研究学报, 2022, 36(12): 945-950. [6] CUI Li, SUN Lili, GUO Peng, MA Xin, WANG Shuyuan, WANG Aiying. Effect of Deposition Time on Structure and Performance of Diamond-like Carbon Films on PEEK[J]. 材料研究学报, 2022, 36(11): 801-810. [7] ZHANG Jun, PENG Lijing, WANG Yu, WANG Xiaoyang, WANG Nan, WANG Meihan. Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films[J]. 材料研究学报, 2022, 36(1): 55-61. [8] LI Xiuxian, QIU Wanqi, JIAO Dongling, ZHONG Xichun, LIU Zhongwu. Promotion Effect of α-Al2O3 Seeds on Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering[J]. 材料研究学报, 2022, 36(1): 8-12. [9] SUN Liying, QIAN Jianhua, ZHAO Yongfang. Preparation and Performance of AgNWs -TPU/PVDF Flexible Film Capacitance Sensors[J]. 材料研究学报, 2021, 35(6): 441-448. [10] SUN Maolin, GONG Zhen, WANG Shiwen, YIN Hang, LI Ruiwu, ZHANG Zheng, LI Yutong, WU Fayu. Optical and Electrical Properties of Oxygen-controlled In2O3 Film[J]. 材料研究学报, 2021, 35(5): 394-400. [11] ZHANG Zeling, WANG Shiqi, XU Bangli, ZHAO Yuhao, ZHANG Xuhai, FANG Feng. Electrocatalytic Oxygen Evolution Performance of High Entropy FeCoNiMoCr Alloy Thin Film Electrode[J]. 材料研究学报, 2021, 35(3): 193-200. [12] XIONG Wenwen, HE Song, ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao. Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD[J]. 材料研究学报, 2021, 35(2): 154-160. [13] SONG Guihong, LI Xiuyu, LI Guipeng, DU Hao, HU Fang. Thermoelectric Properties of Mg-rich Mg3Bi2 Films Prepared by Magnetron Sputtering[J]. 材料研究学报, 2021, 35(11): 835-842. [14] XIE Mingling, ZHANG Guang'an, SHI Xing, TAN Xi, GAO Xiaoping, SONG Yuzhe. Anti-oxidization and Electronic Properties of Ti Doped MoS2 Films[J]. 材料研究学报, 2021, 35(1): 59-64. [15] ZHANG Dalei, WEI Enze, JING He, YANG Liuyang, DOU Xiaohui, LI Tongyue. Construction of Super-hydrophobic Structure on Surface of Super Ferritic Stainless Steel B44660 and Its Corrosion Resistance[J]. 材料研究学报, 2021, 35(1): 7-16. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed