硫化温度对铜锌锡硫薄膜特性的影响*

材料研究学报

2013, Vol. 27

Issue (2): 126-130

研究报告

本期目录 | 过刊浏览

硫化温度对铜锌锡硫薄膜特性的影响*

谢敏庄大明刘江郭力宋军

(清华大学材料学院先进成形制造教育部重点实验室北京 100084)

The Influence of Sulfurization Temperature on the Properties of Cu₂ZnSnS₄ Thin Films

XIE Min ZHUANG Daming^** LIU Jiang GUO Li SONG Jun

(Key Lab of Advanced Processing and Manufacturing, Ministry of Education,
School of Material Science and Engineering, Tsinghua University, Beijing 100084)

引用本文:

谢敏庄大明刘江郭力宋军. 硫化温度对铜锌锡硫薄膜特性的影响*[J]. 材料研究学报, 2013, 27(2): 126-130.
. The Influence of Sulfurization Temperature on the Properties of Cu₂ZnSnS₄ Thin Films[J]. Chinese Journal of Materials Research, 2013, 27(2): 126-130.

全文: PDF(2762 KB)

摘要: 采用预制膜硫化法制备铜锌锡硫(CZTS)薄膜, 分别在350, 400, 450, 500, 550 ℃进行硫化, 研究了硫化温度对薄膜特性的影响。结果表明: 硫化温度低于400 ℃时硫化反应基本上不发生, 主要发生Cu₆Sn₅和Cu₅Zn₈两相中元素相互扩散的合金化过程, 只有少量硫化物Sn₃S₄和ZnS生成; 硫化温度为450 ℃时, 合金相消失, 硫化后的薄膜同时含有CZTS和SnS; 硫化温度为500 ℃时薄膜的主要组成相为CZTS, 其晶粒尺寸达2 μm, 但表面粗糙; 硫化温度为550 ℃薄膜中CZTS晶粒尺寸约为2 μm, 表面平整。

关键词 ：无机非金属材料, 太阳电池, 铜锌锡硫, 溅射, 硫化

Abstract：The CZTS thin films were fabricated by sulfurization of sputtered CZT precursors, vulcanized at 350, 400, 450, 500 and 550 ℃ respectively, characterized through the analyses of XRD, XRF, SEM and Raman spectrum, and the influences of sulfurization temperature on the compositional and structural properties of CZTS thin films were investigated. The results show that the sulfurization process did not occur in the films sulfurized at the temperature of less than 400 ℃. Instead, the main change in the films was the inter-diffusion of the alloying elements, accompanying with the appearance of tiny amount of Sn₃S₄and ZnS. CZTS appeared in films sulfurized at 450 ℃ while a quantity of SnS also existed in the films. For films sulfurized at 500 ℃, principal phase is CZTS with grain size of almost 2 μm, yet with a high surface roughness at the same time. For films sulfurized at 550 ℃, CZTS thin films with grain size around 2 μm and smooth surface were obtained.

Key words： inorganic non-metallic materials solar cells Cu₂ZnSnS₄ sputtering sulfurization

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