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| 几种单晶半导体材料在压痕下的变形与断裂行为比较 |
| 尧志刚; 朱晓飞 ; 张广平 |
| 中国科学院金属研究所沈阳材料科学国家(联合)实验室 沈阳110016 |
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| Comparison of indentation-induced deformation and fracture of several kinds of semiconductor single crystals |
| YAO Zhigang ; ZHU Xiaofei; ZHANG Guangping |
| Shenyang National Laboratory for Materials Science; Institute of Metal Research; Chinese Academy of Sciences; Shenyang 110016 |
引用本文:
尧志刚 朱晓飞 张广平. 几种单晶半导体材料在压痕下的变形与断裂行为比较[J]. 材料研究学报, 2009, 23(2): 180-186.
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Comparison of indentation-induced deformation and fracture of several kinds of semiconductor single crystals[J]. Chin J Mater Res, 2009, 23(2): 180-186.
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