|
|
衬底偏压对线性离子束DLC膜微结构和物性的影响 |
代伟; 吴国松; 孙丽丽; 汪爱英 |
中国科学院宁波材料技术与工程研究所 宁波 315201 |
|
Effect of substrate bias on microstructure and properties of diamond-like carbon films by linear ion beam system |
DAI Wei; WU Guosong; SUN Lili; WANG Aiying |
Ningbo Institute of Material Technology & Engineering; Chinese Academy of Sciences; Ningbo 315201 |
引用本文:
代伟 吴国松 孙丽丽 汪爱英. 衬底偏压对线性离子束DLC膜微结构和物性的影响[J]. 材料研究学报, 2009, 23(6): 598-603.
.
Effect of substrate bias on microstructure and properties of diamond-like carbon films by linear ion beam system[J]. Chin J Mater Res, 2009, 23(6): 598-603.
1 J.Robertson, Diamond-like amorphous carbon, Materials science and Engineering R, 37, 129(2002)
2 J.K.Luo, A.J.Flewitt, S.M.Spearing, N.A.Fleck, W.I.Milne, Normally closed microgrippers using a highly stressed diamond-like carbon and Ni bimorph structure, Applied Physics Letters, 85, 5748(2004)
3 C.Casiraghi, J.Robertson, A.C.Ferrari, Diamond-like carbon for data and beer storage, materials today, 10, 1(2007)
4 C.Donnet, A.Erdemir, Tribology of diamond-like carbon films: fundamentals and applications, published by Springer (2008) p.13
5 R.K.Roy, K.R.Lee, Biomedical Applications of Diamondlike Carbon Coatings: A Review, J. Biomedical Materials Research B, 83, 72(2007)
6 A.C.Ferrari, S.E.Rodil, J.Robertson, W.I.Milne, Is stress necessary to stabilize sp3 bonding in diamond-like carbon, Diamond and Related Materials, 11, 994(2002)
7 S.Xu, D.Flynn, B.K.Tay, S.Prawer, K.W.Nugent, S.R.P.Silva, Y.Lifshitz, W.I.Milne, Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high SP3 fraction deposited using a filtered cathodic arc, Philos. Mag. B, 76, 351(1997)
8 C.Casiraghi, A.C.Ferrari, J.Robertson, Raman spectroscopy of hydrogenated amorphous carbon, Physical Review B, 72, 85(2005)
9 C.A.Davis, A simple model for the formation of compressive stress in thin films by ion bombardment, Thin Solid Films, 226, 30(1993)
10 R.Hauert, An overview on the tribological behavior of diamond-like carbon in technical and medical applications, Tribology International, 37, 991(2004) |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
|
Shared |
|
|
|
|
|
Discussed |
|
|
|
|