|
|
|
| Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering |
| ;;; |
| 大连理工大学三束材料改性国家重点实验室 |
|
Cite this article:
;. Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering. Chin J Mater Res, 2004, 18(2): 171-175.
|
|
|
Abstract Smooth, dense and uniform diamond--like carbon (DLC) films for
industrial application were successfully prepared by unbalanced
magnetron sputtering. The morphology, structure and tribological
properties were studied by AFM, Raman spectra and tribological tester.
Results show that working current of target plays an important role in
DLC film deposition. Deposition rate, sp$^{3}$ bonds content and
friction coefficient increase with increasing the working current of
target. In the beginning of the wear experiment, the friction
coefficient is high, but then decreases gradually with the increase of
sliding cycles, reaching a constant value ranging between 0.1 and 0.15.
|
|
Received: 21 May 2004
|
|
|
1 C.Donnet, Surf.Coat. Technol.,100～101,180(1998)
2 J.Robertson, Surf.Coat. Technol.,50,185(1992)
3 Teruyuki Kitagawa,Isao Yanada,Noriaki Toyoda,Harushige Tsubakino,Jiro Matsuo,G.H.Takaoka,Allen Kirkpatrick,Nucl.Instr.and Meth.in Phys.Res.B,201,405(2003)
4 Jyh-Ming Ting,Howard Lee, Diam. Relat.Mater.,11,1119(2002)
5 Othon R.Monteriro,Marie-Paule Delplancke-Ogletree,Surf.Coat.Technol.,163～164,144(2003)
6 H.Inaba,S.Fujimaki, K.Furusawa,S.Todoroki,Vacuum,66,487(2002)
7 K.Baba,R.Hatada,Nucl.Instr.and Meth.in Phys.Res.B,206,708(2003)
8 V.Bursikova,V.Navratil,L.Zajickova,J.Janca,Mater.Sci.Eng.,A324,251(2002)
9 P.J.Martin,A.Bendavid,Thin Solid Films,394,1(2001)
10 A.Sanchez,C.Rincon,G.Zamberano,H.Galindo,P.Prieto,Thin Solid Films,373,247(2000)
11 Nobuki Mutsukura,Vacuum,56,129(2000)
12 Y.Liu,Aerdemir,E.I.Meletis,Surf.Coat.Technol.,82,48(1996)
13 Liuhe Li,Haiquan Zhang,Yanhua Zhang,Paul K.Chu,Xiubo Tian,Lifang Xia,Xinxin Ma,Mater.Sci.Eng.,B94,95(2002)
14 Y.Funada,K.Awazu,K.Shimamura,M.Iwaki,Surf Coat.Technol.,103～104,389(1998)
15 B.K.Tay,X.Shi,H.S.Tan,H.S.Yang,Z.Sun,Surf Coat.Technol.,105,155(1998)
16 J.Robertson,Advanced in Physics,35(4) ,317(1986)
17 J.Schuan,S.Ulrich,V.Batori,H.Ehrhardt,S.R.P.Silva,J.Appl.Phys.,80,440(1996)
18 C.Donnet,A.Grill,Surf.Coat.Technol.,94～95,456(1997)
19 C.Donnet,Surf Coat.Technol.,80,151(1996)
20 R.Hauert,U.Muller,Diam.Relat.Mater.,12,171(2003) |
| No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
| |
Shared |
|
|
|
|
| |
Discussed |
|
|
|
|
