Absorption property in visible region of TiO2-xNx films prepared by reactive sputtering

Chin J Mater Res

2004, Vol. 18

Issue (1): 108-108 DOI:

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Absorption property in visible region of TiO2-xNx films prepared by reactive sputtering

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清华大学机械工程系

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;. Absorption property in visible region of TiO2-xNx films prepared by reactive sputtering. Chin J Mater Res, 2004, 18(1): 108-108.

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Abstract N-doped TiO2 films were prepared by mid-frequency alternative reactive magnetron sputtering. The N concentration of the TiO2－xNx films was analyzed by XPS. And the absorption properties of the films in visible region were closely investigated. The results show that the percentage of N2 in reactive gases is key variable to influence the concentration of Ti-N bond in TiO2－xNx films. Annealing TiO2－xNx film in nitrogen atmosphere at 380℃ is favorable to increase its atomic concentration of nitrogen. The increase of the thickness of TiO2－xNx films enhances the absorbability of TiO2－xNx films. The wavelength of the absorption edge for TiO2－xNx film with 1.5% nitrogen has a obvious redshift from 387nm to 441nm.

Key words: inorganic non-metallic materials TiO2 films nitrogen-doping

Received: 02 April 2004

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1 K.Bange, C.R.Ottermann, O.Anderson, U.Jeschkowski, U.Laube, R.Feile, Thin Solid Films, 197, 279(1991)
2 T.Watanabe, A.Nakajima, R.Wang, M.Minabe, S.Koizumi, A.Fujishima, K.Hashimoto, Thin Solid Films, 351, 260(1999)
3 H.Tang, K.Prasad, R.Sanjines, F.Levy, Sensors Actuators, B26, 71(1995)
4 K.M.Glassford, J.R.Chelikowsky, Phys.Rev., B46(3) , 1284(1992)
5 P.Alexandrov, J.Koprinarova, D.Todorov, Vacuum, 47(11) , 1333(1996)
6 J.Szczyrbowski, G.Brauer, M.Ruske, G.Teschner, A.Zmelty, Non-Crystalline Solids, 218, 262(1997)
7 R.Asahi, T.Morikawa, T.Ohwaki, K.Aoki, Y.Taga, Science, 293(13July), 269(2001)
8 N.Negishi, K.Takeuchi, T.Ibusuki, Applied Surface Science, 121/122, 417(1997)
9 Tuan Allan, Yoon Meeyoung, Medvedev Valentin, Ono Yoshi, Ma Yanjun, Jr. Rogers J.W., Thin Solid Films, 377-378, 766(2000)
10 MA Ying, Yao Jiannian, Journal of Photochemistry and Photobiology A: Chemistry, 116, 167(1998)
11 Y.Masuda, T.Sugiyama, H.Lin, W.S.Seo, K.Koumoto, Thin Solid Films, 382, 153(2001)
12 Deng Huihua, Zhang Hong, Lu Zuhong, Chemical Physics Letters, 363, 509(2002)
13 M.J.Alam, D.C.Cameron, Thin Solid Films, 420-421, 76(2002)
14 Kaliwoh Never, Zhang Junying, Boyd W. Ian, Surface and Coatings Technology, 125, 424(2000)
15 WANG Guozhong(汪国忠), WANG Chunchang(汪春昌), ZHANG Lide(张立德), MOU Jimei(牟季美), Chinese Journal of Materials Research(材料研究学报), 11(5) , 527(1997)

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