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| Tribological Properties of Diamond– like Carbon Films Deposited by PECVD |
| WANG Qingliang, SUN Yanmin, ZHANG Lei |
| School of Material Science and Engineering, China University of Mining & Technology, Xuzhou 221116 |
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Cite this article:
WANG Qingliang SUN Yanmin ZHANG Lei. Tribological Properties of Diamond– like Carbon Films Deposited by PECVD. Chin J Mater Res, 2011, 25(1): 73-78.
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Abstract Diamond–like carbon (DLC) films were prepared on the surface of 45 steel substrates by the radio–frequency plasma enhanced chemical vapor deposition (rf–PECVD) technique. The bond structure, surface morphology and microstructure of DLC film were characterized with a laser Raman spectroscopy (Raman), X–ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscope (AFM). The hardness of DLC film was determined by the tribo–indenter in − situ nano–mechanical test system. Tribological behaviors of DLC film against GCr15 steel were performed using a UMT– friction and wear tester under the various normal loads and sliding speeds. And the wear mechanisms were also analyzed. The experimental results showed that the thin film deposited on the surface of 45 steel has the typical structural characteristics of DLC film. The surface of DLC film composes of the compact nano–particles, which has the higher hardness than that of the 45 steel substrates. Under the different tribological conditions, DLC film showed the higher wear–resistance and lower friction coefficient compared with the 45 steel substrates. Especially in the high–speed and low–load conditions, the friction coefficient was lower than 0.008.
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Received: 13 October 2010
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| Fund: Supported by National Key Basic Research and Development Program of China No.2007CB607605, and Tribology Science Fund from State Key Laboratory of Tribology (SKLT) at Tsinghua University No.SKLTKF08A01. |
| 1 J.Robertson, Diamond–like amorphous carbon, Materials Science and Engineering, 37, 129(2002)2 A.Grill, Tribology of diamond like carbon and related materials: an updated review, Surface and Coatings Technology, 91, 507(1997)3 LIU Hongxi, JIANG Yehua, ZHOU Rong, ZHAN Zhaolin, TANG Baoyin, Effect of diamond–like carbon films on the bearing steel surface mechanical properties and rolling contact fatigue life, Chinese Journal of Materials Research,23(1), 43(2009)(刘洪喜, 蒋业华, 周荣, 詹肇麟, 汤宝寅, 类金刚石薄膜对轴承钢表面机械性能和滚动接触疲劳寿命的影响, 材料研究学报, 23(1), 43(2009))4 R.Hauert, An overview on the tribological behavior of diamond–like carbon in technical and medical applications, TribologyInternational, 37, 991(2004)5 LIU Hongxi, SU Haiqing, JIANG Yehua, MENG Chunlei, LIN Bo, Characteristics and rolling contact fatigue model of diamond–like carbon films on aerospace bearing surfaces, Acta Aeronautica Et Astronautica Sinica, 30(9), 1769(2009)(刘洪喜, 苏海青, 蒋业华, 孟春蕾, 林波, 航空轴承表面合成DLC薄膜的结构特征和滚动接触疲劳物理模型, 航空学报, 30(9), 1769(2009))6 LI Zhenjun, XU Tao, LI Hongxuan, HAO Junying, ZHOU Huidi, CHEN Jianmin, Review on tribological properties and wear mechanisms of diamond–like carbon films, Journal of Materials Science & Engineering, 22(5), 774(2004)(李振军, 徐洮, 李红轩, 郝俊英, 周惠娣, 陈建敏, 类金刚石薄膜的摩擦学特性及磨损机制研究进展, 材料科学与工程学报, 22(5), 774(2004))7 C.Donnet, A.Grill, Friction control of diamond–like carbon coatings, Surface and Coatings Technology, 94-95, 456(1997)8 O.GI.zman, A.Hoffman, Adhesion improvement of diamond films on steel subtrates using chromium nitride interlayers, Diamond and Related Materials, 6, 796(1997)9 M.D.Bentzon, K.Mogensen, J.Bindslev Hansen, C.Barho1m∼Hansen, C.Tneholt, P.Holiday, S.S.Eskildsen, Metallic interlayers between steel and diamond–like carbon, Surface and Coatings Technology, 68–69, 651(1994)10 A.Erdemir, O.L.Eryilmaz1, I.B.Nilufer, G.R.Fenske, Synthesis of super low–friction carbon films from highly hydrogenated methane plasmas, Surface and Coatings Technology, 133–134, 448(2000)11 Kwang Ryeol Lee, Kwang Yong Eun, Inyoung Kim, Jongryoul Kim, Design of W buffer layer for adhesion improvement of DLC films on tool steels, Thin Solid Films, 377–378, 261(2000)12 O.Glozman, G.Halperin, I.Etsion, A.Berner, D.Shectman, G.H.Lee, A. Hoffman, Study of the wear behavior and adhesion of diamond films deposited on steel substrates by use of a Cr—N interlayer, Diamond and Related Materials, 8, 859(1999)13 C.Casiraghi, F.Piazza, A.C.Ferrari, D.Grambole, J.Robertson, Bonding in hydrogenated diamond–like carbon by Raman spectroscopy, Diamond and Related Materials, 14, 1098(2005)14 Andrea Carlo Ferrari, Determination of bonding in diamond–like carbon by Raman spectroscopy, Diamond and Related Materials, 11, 1053(2002)15 DU Jun, TIAN Linhai, Wear resistance comparison of CrN and amorphous carbon films grown by ion beam assisted deposition, Chinese Journal of Vacuum Science and Technology,26(3), 255(2006)(杜军, 田林海, IBAD制备非晶碳膜与CrN镀层的耐磨性能比较及机理分析, 真空科学与技术学报, 26(3), 255(2006))16 LI Hongxuan, XU Tao, CHEN Jianmin, ZHOU Huidi, LIU Huiwen, Effect of RF power on the structure and propertie s of diamond–like carbon films, Acta Physica Sinica, 54(4), 1885(2005)(李红轩, 徐 洮, 陈建敏, 周惠娣, 刘惠文, 射频功率对类金刚石薄膜结构和性能的影响, 物理学报, 54(4), 1885(2005))17 ZHANG Taihua, LIU Dongxu, HUAN Yong, YANG Yemin, WANG Xiulan, Micro/nanomechanical and tribological properties of thin diamond–like carbon coatings, Chinese Journal of Aeronautics, 16(1), 47(2003)18 CHEN Jianguo, CHENG Yuhang, WU Yiping, XU Daqing, QIAO Xueliang, Test on Internal Stress in Diamond–Like Carbon Films, Physical Testing and Chemical Analysis Part A: Physical Testing, 34(2), 21, 27–28(1998)(陈建国, 程宇航, 吴一平, 许大庆, 乔学亮, 类金刚石薄膜内应力的测试, 理化检验：物理分册, 34(2), 21, 27--28(1998))19 ZHANG Yan, The properties of diamond–like carbon films on stainless steel by rf–PECVD, Master Dissertation, Northeastern University, February(2006)(张 艳, rf--PECVD法在不锈钢表面沉积类金刚石碳膜的性能研究, 硕士学位论文, 东北大学(2006))20 WU Xiaoling, LI Xijin, XUE Wenbin, HOU Xinggang, ZHANG Xu, CHENG Guoan, LIU Andong, Duplex Al2O3/DLC coatings for wear protection, Materials Science & Technology, 15(6), 754(2007)(吴晓玲, 李夕金, 薛文斌, 侯兴刚, 张 旭, 程国安, 刘安东, Al2O3/DLC复合膜摩擦磨损性能的研究, 材料科学与工艺, 15(6), 754(2007))21 YanLiu, E I Meletis, Evidence of graphitization of diamond like carbon films during sliding wear, Journal of Materials Science, 32(13), 3491(1997)22 Y.Liu, A.Erdemir, E.I.Meletis, An investigation relationship between graphitization and friction behavior of DLC coatings, Surface and Coatings Technology, 86–87, 564(1996)23 DAI Bing, ZHANG Henghua, HUANG Bo, GAO Guoqiang, Effect of DLC surface treatment on wear resistance of high speed steel, Surface Technology, 37(6), 24(2008)(戴兵, 张恒华, 黄波, 高国强, DLC表面处理对高速钢耐磨性能的影响, 表面技术, 37(6), 24(2008)) |
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