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Chin J Mater Res  1990, Vol. 4 Issue (3): 273-276    DOI:
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PROPERTIES OF SURFACE AND WHISKER-LIKE MICROSTRUCTURES OF AMORPHOUS SILICON
LIN Hongyi(Beijing Institute of Technology)
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LIN Hongyi(Beijing Institute of Technology). PROPERTIES OF SURFACE AND WHISKER-LIKE MICROSTRUCTURES OF AMORPHOUS SILICON. Chin J Mater Res, 1990, 4(3): 273-276.

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Abstract  The surface,the interface and the microstructures of the undoped hydrogenated amorphoussilicon films by RF plasma chemical vapor deposition are investigated.The whisker-like microstructures(amorphous silicon whisker)are observed by transmission electron m
Key words:  amorphous silicon      film      surface      interface      amorphous silicon whisker      microstructure     
Received:  25 June 1990     
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