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PROPERTIES OF SURFACE AND WHISKER-LIKE MICROSTRUCTURES OF AMORPHOUS SILICON |
LIN Hongyi(Beijing Institute of Technology) |
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Cite this article:
LIN Hongyi(Beijing Institute of Technology). PROPERTIES OF SURFACE AND WHISKER-LIKE MICROSTRUCTURES OF AMORPHOUS SILICON. Chin J Mater Res, 1990, 4(3): 273-276.
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Abstract The surface,the interface and the microstructures of the undoped hydrogenated amorphoussilicon films by RF plasma chemical vapor deposition are investigated.The whisker-like microstructures(amorphous silicon whisker)are observed by transmission electron m
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Received: 25 June 1990
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1 Spear W E,Le comber P G.Solid state commun,1975;17:1193 2 林鸿溢.新技术新工艺,1987;2:2 3 Sichanugrist P et al.Japan J Appl phys,1986;25:440 4 Nishida Set al.Meter Res Soc,1985;49:47 5 Herak T V et al.J Non-Cryst Solids,1988;103:125 6 Hattori R et al.J Non-Cryst Solids,1988;104:52 7 Lo C F et al.J Non-Cryst Solids,1988;103:3 8 Godet C,Drevillon B.J Vac Sci Technol A,1988;6:2484 9 林鸿溢,李映雪.真空科学与技术,1985;4:9 10 林鸿溢.电子显微学报,1985;3:46 11 Lin H Y(林鸿溢),Li Y X(李映雪).Proc 2nd International PVSEC'Hong Kong:Adfield Advertising co Lta.1986:528 12 林鸿溢.物理学报,1978;27:291 |
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