GROWTH OF DIAMOND FILMS BY LOWER PRESSURE PHASE

Chin J Mater Res

1990, Vol. 4

Issue (3): 269-272 DOI:

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GROWTH OF DIAMOND FILMS BY LOWER PRESSURE PHASE

ZHANG Baojun;HUANG Suiyang;CANG Fengbo;CHANG Jingyi(China Building Materials Academy)

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ZHANG Baojun;HUANG Suiyang;CANG Fengbo;CHANG Jingyi(China Building Materials Academy). GROWTH OF DIAMOND FILMS BY LOWER PRESSURE PHASE. Chin J Mater Res, 1990, 4(3): 269-272.

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Abstract Vacuum evaporating device which was designed by us is used to grow dia-mond films on the substrate of silicon single crystals from a mixture of CH_4 and H_2 gasesat lower pressure by hot-filament CVD method.The results of X-ray diffraction,Ramanspectrum a

Key words: hot-filament chemical vapour deposition diamond film growth by lower pressure phase

Received: 25 June 1990

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