Preparation and characterization of DLC films for microelectromechanical systems (MEMS) applications

Chin J Mater Res

2004, Vol. 18

Issue (6): 582-586 DOI:

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Preparation and characterization of DLC films for microelectromechanical systems (MEMS) applications

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大连理工大学三束材料改性国家重点实验室

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. Preparation and characterization of DLC films for microelectromechanical systems (MEMS) applications. Chin J Mater Res, 2004, 18(6): 582-586.

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Abstract Diamond--like carbon (DLC) films were prepared on Si(100) substrates by combining plasma source ion implantation and electron cyclotron resonance microwave plasma enhanced chemical vapor deposition technique. Confocal Raman spectra confirmed the DLC characteristics of the films. The surface roughness of the films was measured with an atomic force microscope. The CERT microtribometer system was employed to obtain information about the scratch resistance, friction properties, and sliding wear resistance of the films. The condition of wear was checked by a scanning electron microscope. The results show that the adherent strength between DLC films and substrates was improved by plasma source ion implantation, and the films had low friction coefficient (0.1$\sim$0.15) and good wear--resistant performance.

Key words: inorganic non-metallic materials diamond-like carbon plasma source ion implantation plasma enhanced

Received: 29 December 2004

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1 WANG Liding, LIU Chong, Journal of Dalian University of Technology, 40(5), 505(2000) (王立鼎,刘冲,大连理工大学学报,40(5),505(2000))
2 J.M.Sallese, P.Fazan, Sens. Actuators A, 109(3), 186(2004)
3 R.Bandorf, H.Luthje, T.Staedler, Diamond Relat. Mater., 13, 1491(2004)
4 J.Robertson, Mater. Sci. Eng. R: Reports, 37, 129(2002)
5 WANG Weiyuan, WANG Xiaodong, MAO Minyao, YANG Yirong, REN Congxin, XIE Jianfang, Science Bulletin, 44(4), 355(1999) (王渭源,王效东,毛敏耀,杨艺榕,任琮欣,解健芳,科学通报,44(4),355(1999))
6 Y.T.Kim, S.M.Cho, W.S.Choi, B.Hong, D.H.Yoon, Surf. Coat Technol., 169-170, 291(2003)
7 LI Xin, TANG Zhenan, MA Guojia, Chin. Phys. Lett., 20(5), 692(2003)
8 J.P.Melissa, Diamond Relat. Mater., 3-6, 1053(2002)
9 F.A.Carlo, Diamond Relat. Mater., 5, 1407(1996)
10 LI Xiaodong, B.Bhushan, K.Takashima, C.W Baek, Y.K.Kim, Ultramicroscopy, 97, 481(2003)

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