脉冲激光沉积技术生长铜材碳基保护膜

doi:10.11901/1005.3093.2022.681

材料研究学报

2023, Vol. 37

Issue (9): 706-712 DOI: 10.11901/1005.3093.2022.681

研究论文

本期目录 | 过刊浏览

脉冲激光沉积技术生长铜材碳基保护膜

陆益敏¹(

), 马丽芳², 王海¹, 奚琳¹, 徐曼曼¹, 杨春来¹

^1.安徽工程大学机械工程学院芜湖 241000
^2.中国人民解放军陆军炮兵防空兵学院高过载弹药制导控制与信息感知实验室合肥 230031

Carbon-base Protective Coating Grown by Pulsed Laser Deposition on Copper Substrate

LU Yimin¹(

), MA Lifang², WANG Hai¹, XI Lin¹, XU Manman¹, YANG Chunlai¹

^1.School of Mechanical Engineering of Anhui Polytechnic University, Wuhu 241000, China
^2.High Overload Ammunition Guidance and Control and Information Perception Laboratory, PLA Army Academy of Artillery and Air Defense, Hefei 230031, China

引用本文:

陆益敏, 马丽芳, 王海, 奚琳, 徐曼曼, 杨春来. 脉冲激光沉积技术生长铜材碳基保护膜[J]. 材料研究学报, 2023, 37(9): 706-712.
Yimin LU, Lifang MA, Hai WANG, Lin XI, Manman XU, Chunlai YANG. Carbon-base Protective Coating Grown by Pulsed Laser Deposition on Copper Substrate[J]. Chinese Journal of Materials Research, 2023, 37(9): 706-712.

全文: PDF(5522 KB) HTML

摘要:

用脉冲激光沉积技术制备三种结构的金属铜材碳基保护膜，分析了失效样品剥离面的微结构。结果表明，在室温条件下生长的碳基复合膜，碳化硅层增强了界面间结合力、避免了类金刚石内应力积累导致的脱落。优化的碳基复合膜牢固地附着在金属铜材上，通过了国军标《光学薄膜通用规范(GJB 2485-95)》中附着力和中度摩擦测试。碳基复合膜使金属铜基材样品表面的纳米硬度比铜基材提高了4倍，增强了铜基材的抗划伤能力。

关键词 ：材料表面与界面, 碳基复合膜, 脉冲激光沉积, 附着特性, 失效面诊断

Abstract：

Carbon-based coatings, similar to diamond-like film, have lower friction, good corrosion resistance, and other excellent properties, which can be used as protective layers in wide fields. A high adhesive strength of the coating or film on the substrate is the critical requirement for application. However, it is impossible to grow carbon-based layers directly on the most of metals like copper, because they have a high mismatch interface. Based on the former researches and the references, the carbon-based complex coatings with three different structures were designed and grown by pulsed laser deposition. Diamond-like carbon and silicon carbide, the carbon-based materials, were deposited as the functional layer and buffer layer respectively, to make composite coatings. The interface with the weakest bonding force in the designed carbon-based complex coating was found by analyzing the micro-structure of the failure interface in the peeling coating samples. The results of comparative experiments indented that the silicon carbide layer, which played a key role in enhancing the adhesive property of the carbon-based complex coating grown at the room temperature on the metal copper substrate, could increase the bonding force of the interface between the diamond-like carbon functional layer and the metal titanium transition layer, and reduce the invalid problem of the complex coating due to the inner-stress accumulation in the thick diamond-like carbon film. The carbon-based coating of excellent adhesion could successively be prepared on the metal copper substrate, and the products can pass the relative tests regulated in the subsections ‘3.4.1.1 adhesive force’ and ‘3.4.1.3 moderate friction’ in the national military standard of ‘general specifications for optical films (GJB 2485-95)’. Nano-hardness of the coating on the copper substrate increased by 4 times compared with the bare copper, which enhanced the anti-scratch performance.

Key words： surface and interface in the materials carbon-based complex coating pulsed laser deposition adhesive property failure interface diagnosis

收稿日期: 2022-12-29

ZTFLH:

TN340.2

基金资助:安徽省高校科学研究重点项目(2022AH050982);安徽工程大学引进人才科研启动基金(2022YQQ001);安徽工程大学校立项目(Xjky2022008)

通讯作者: 陆益敏，luyimin_zy@163.com，研究方向为功能薄膜及其应用

Corresponding author: LU Yimin, Tel: 15927643720, E-mail: luyimin_zy@163.com

作者简介: 陆益敏，男，1981年生，博士

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表1 多层碳基复合膜的结构设计

图1 靶面上的光斑形状

图2 碳基复合膜结构I表面的皱褶

图3 碳基复合膜结构II的剥离面及其XPS诊断结果

图4 碳基复合膜结构III表面的XPS测试结果

图5 碳基膜和碳基复合膜的拉曼光谱

图6 碳基复合膜结构III的纳米压痕测试结果

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