化学气相沉积C-TaC涂层的结构及其摩擦性能*

doi:10.11901/1005.3093.2015.695

材料研究学报

2016, Vol. 30

Issue (9): 690-696 DOI: 10.11901/1005.3093.2015.695

研究论文

本期目录 | 过刊浏览

化学气相沉积C-TaC涂层的结构及其摩擦性能*

吕东泽,陈招科,熊翔,王雅雷,孙威,黎泽豪

中南大学粉末冶金国家重点实验室长沙 410083

Microstructure and Tribological Property of C-TaC Coatings on Graphite Prepared by Chemical Vapor Deposition

Dongze LV,Zhaoke CHEN,Xiang XIONG,Yalei WANG,Wei SUN,Zehao LI

State Key Laboratory of Powder &Metallurgy, Central South University, Changsha 410083, China

引用本文:

吕东泽,陈招科,熊翔,王雅雷,孙威,黎泽豪. 化学气相沉积C-TaC涂层的结构及其摩擦性能*[J]. 材料研究学报, 2016, 30(9): 690-696.
Dongze LV, Zhaoke CHEN, Xiang XIONG, Yalei WANG, Wei SUN, Zehao LI. Microstructure and Tribological Property of C-TaC Coatings on Graphite Prepared by Chemical Vapor Deposition[J]. Chinese Journal of Materials Research, 2016, 30(9): 690-696.

全文: PDF(3212 KB) HTML

摘要:

利用TaCl₅-C₃H₆-Ar 反应体系, 用化学气相沉积法(CVD), 在高纯石墨表面制备了不同炭含量的C-TaC复相涂层。研究了室温条件下C-TaC复相涂层的摩擦学性能。采用扫描电镜、X射线衍射仪、X射线光电子能谱仪等对涂层的微观组织结构及摩擦表面形貌进行了分析。研究发现: Ta的加入促使热解炭中更多sp²杂化键的形成, 促进炭基涂层的石墨化。当炭含量为86.4%(质量分数)时, 涂层结构为热解炭与TaC晶粒相结合的纳米复相结构, 此时涂层的摩擦系数最低, 为0.13, 且摩擦曲线平稳, 磨损机制主要为磨粒磨损、黏着磨损和疲劳磨损。通过调节涂层中热解炭的含量以及晶粒大小可改善其摩擦学性能。

关键词 ：复合材料, 材料表面与界面, C-TaC复相涂层, 化学气相沉积, 微观结构, 摩擦性能

Abstract：

C-TaC coatings with different C contents (in mass fraction) were deposited on pure graphite by chemical vapor deposition technique with a gas mixture of TaCl₅-Ar-C₃H₆. The tribological properties of the as-prepared coatings were characterized by multifunctional tribometer. The microstructures of the coatings and then the morphologies of the friction surface were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The results show that the addition of an appropriate amount of Ta to a pure carbon coating can increase the content of sp² bonds in the carbon coatings, and can improve the degree of graphitization of the carbon based coatings. When the mass fraction of C in the coatings was 86.4%, the coating show a nano composite structure with the pyrolytic carbon matrix embedded with nanometersized TaC crystallites and among others, which shows the smallest friction coefficient of 0.13. The wear mechanism may mainly concern with adhesive wear, fatigue wear and abrasive wear. By controlling the carbon content and the size of the crystallites in the coating, the friction coefficient of the coating can be adjusted effectively.

Key words： composite materials surface and interface in the materials C-TaC composite coatings chemical vapor deposition microstructure friction behavior

收稿日期: 2015-12-02

基金资助:* 国家重点基础研究发展项目2011CB605805,湖南省科技计划项目2015WK3013和中南大学粉末冶金国家重点实验室项目资助

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https://www.cjmr.org/CN/10.11901/1005.3093.2015.695 或 https://www.cjmr.org/CN/Y2016/V30/I9/690

表1 CVD法制备 C-TaC涂层的工艺参数

表2 不同丙烯流量(FC3H6)下沉积涂层的成分以及通过Scherrer公式计算的TaC晶粒尺寸(D)

图1 TaC涂层(a)及炭含量分别为72.0%(b)、86.4%(c)和93.8%(d)时C-TaC涂层的横截面形貌SEM照片

图2 TaC涂层(a)及炭含量分别为72.0% (b)、86.4% (c)和93.8%(d)时C-TaC涂层的XRD图谱

图3 纯炭涂层及炭含量为86.4%的C-TaC复相涂层的C1s峰拟合

图4 不同涂层试样的摩擦系数

图5 TaC涂层、炭含量分别为72.0%, 86.4%, 93.8%的C-TaC涂层及热解炭涂层的摩擦表面形貌

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