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材料研究学报  1997, Vol. 11 Issue (3): 231-239    
  研究论文 本期目录 | 过刊浏览 |
金刚石薄膜品质及其表征
郑昌琼;张铭诚;冉均国
四川联合大学;四川联合大学;四川联合大学
QUALITY OF THE DIAMOND FILM AND ITS CHARATERIZATION
ZHENG Changqiong; ZHANG Mingcheng; RAN Junguo (Sichuan Union University)
引用本文:

郑昌琼;张铭诚;冉均国. 金刚石薄膜品质及其表征[J]. 材料研究学报, 1997, 11(3): 231-239.
, , . QUALITY OF THE DIAMOND FILM AND ITS CHARATERIZATION[J]. Chin J Mater Res, 1997, 11(3): 231-239.

全文: PDF(938 KB)  
摘要: 阐述了金刚石薄膜中成分、结构、夹杂尤其是化学与结构缺陷对热、电、光学、机械、化学性质的影响.介绍了薄膜品质检测、表征方法的新进展.表明品质表征有向点缺陷类别及其浓度分布、掺杂和偏折方向深入的趋势.为了控制品质、增强薄膜特性、开发新的器件,必须探求更完善的分析方法建议在SEM-WDCL(阴极荧光扫描电子显微分析装置)上,在确保‘CL’(阴极荧光)最高收集效率条件下,力求不降低原有SEM的空间分辨率;在‘CL’谱对杂质有很高灵敏度基础上完善定量分析能力,结合数字图象分析,取得了膜中缺陷、掺杂、偏析乃至非金刚石碳的分布统计
关键词 金刚石薄膜缺陷掺杂阴极荧光    
Abstract:In this paper, the effects of composition, structure, inclusion, especilly chemical and structural defects of diamond films on the thermal, electronic, optic, mechanic and chemical properties have been ex-pounded. The new progress of analysis and characte
Key wordsdiamond film defect doping cathodoluminescece
收稿日期: 1997-06-25     
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