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化学气相沉积ZrB2涂层的微观形貌及晶粒择优生长 |
张军,张磊,李国栋( ),熊翔 |
中南大学 粉末冶金国家重点实验室 长沙 410083 |
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Micro-morphology and Preferential Growth of ZrB2 Coating Prepared by Chemical Vapor Deposition |
Jun ZHANG,Lei ZHANG,Guodong LI( ),Xiang XIONG |
State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China |
引用本文:
张军,张磊,李国栋,熊翔. 化学气相沉积ZrB2涂层的微观形貌及晶粒择优生长[J]. 材料研究学报, 2017, 31(3): 168-174.
Jun ZHANG,
Lei ZHANG,
Guodong LI,
Xiang XIONG.
Micro-morphology and Preferential Growth of ZrB2 Coating Prepared by Chemical Vapor Deposition[J]. Chinese Journal of Materials Research, 2017, 31(3): 168-174.
[1] | S. H. Jung, H.C. Oh, J. H. Kim, et al.Pretreatment of zirconium diboride powder to improve densification[J]. J. Alloys Compd., 2013, 548(1): 173 | [2] | Opeka M M, Talmy I G, Zaykoski J A, et al.Oxidation-based materials selection for 2000℃+hypersonic aero surfaces: theoretical considerations and historical experience[J]. Mater Sci., 2004, 39(19): 5887 | [3] | Fahrenholtz W G, Hilmas G E, Refractory diborides of zirconium and hafnium[J]. Am Ceram Soc., 2007, 90(5): 1347 | [4] | Parthasarathy T A, Rapp R A, Opeka M, et al.A model for the oxidation of ZrB2, HfB2 and TiB2[J]. Acta Mater., 2007, 55(17): 5999 | [5] | C. Q. Liu, K. Z. Lin, H. J. Li, et al.In situ synthesis mechanism of ZrB2-ZrC-C composites[J], Ceram. Int, 2014, 40(40): 10297 | [6] | X. Ren, H. J. Li, Y. H. Chu, et al., Preparation of oxidation protective ZrB2-SiC coating by in-situ reaction method on SiC-coated carbon/carbon composites[J]. Surf. Coat. Technol, 2014, 247(5): 61 | [7] | Zhao D, Zhang C R, Zhang Y D, et al., Reactive preparation and properties of ZrB2 coating[J]. J. Inorg Mater, 2011, 26(9): 903 | [7] | (赵丹, 张长瑞, 张玉娣等, 反应法制备硼化锆耐超高温涂层. 无机材料学报[J], 2011, 26(9): 903) | [8] | H J Zhou, G Le, W Zhen, et al.ZrB2-SiC Oxidation Protective Coating on C/C Composites Prepared by Vapor Silicon Infiltration Process[J]. Am Ceram Soc, 2010, 93(4): 915 | [9] | X Zou, Q G Fu, L Liu,et al.ZrB2-SiC coating to protect carbon/carbon composites against ablation[J]. Surf. Coat. Technol, 2013, 226(14): 17 | [10] | X Yang, W Li, S Wang,et al., ZrB2 coating for the oxidation protection of carbon fiber reinforced silicon carbide matrix composites[J]. Vacuum, 2013, 96(10): 63 | [11] | Rupa P K P, Sharma P, Mohanty R M, et al. Microstructure and phase composition of composite coatings formed by plasma spraying of ZrO2 and B4C powders[J]. J. Therm. Spray. Technol, 2010,19(4): 816 | [12] | X Y Yao, H J Li, Y L Zhang,et al., Ablation behavior of ZrB2-based coating prepared by supersonic plasma spraying for SiC-Coated C/C composites under oxyacetylene[J]. J. Therm. Spay .Technol, 2013, 22(4): 531 | [13] | D J Li, M X Wang, J J Zhang, Structural and mechanical responses of (Zr, Al)N/ZrB2 superlattice coatings to elevated-temperature annealing[J]. Mater. Sci. Eng, 2006, 423(1): 116 | [14] | J L Deng, L F Cheng, G P Zheng, et al.Thermodynamic study on co-deposition of ZrB2-SiC from ZrCl4-BCl3-CH3SiCl3-H2-Ar system. Thin Solid Films, 2012, 520(23): 7030 | [15] | A Wang, G Male .Experimental system investigation of the Zr-B-Cl-H CVD[J]. J. Eur Ceram. Soc, 1993, 11(3): 241 | [16] | Chen Q Y, Liu S J, Physical Chemistry [M]. Beijing: Science Press, 2012 | [16] | (陈启元, 刘士军. 物理化学[M]. 北京:科学出版社,2012) | [17] | Li G D, Xiong X, Liu G, et al.Adjustable uniform powder feeder[P]. CHINA, 201010538190, 2010 | [17] | (李国栋, 熊翔, 刘岗等. 均匀可调送粉装置[P]. 中国, 201010538190, 2010) | [18] | R. Y. Korotkov, P. Ricol, A. J. E.Farran. Preferred orientations in polycrystalline SnO2 films grown by atmospheric pressure chemical vapor deposition[J]. Thin Solid Films, 2006, 502(1): 79 | [19] | Chen Q Y, Liu Z J.Physical Chemistry [M]. Beijing, Science Press, 2012) | [19] | (陈启元, 刘士军. 物理化学[M]. 北京:科学出版社,2012) | [20] | K. L. Bjorklund, J. Lu, P. Heszler, et al., Kinetics, thermodynamics and microstructure of tungsten rods grown by thermal laser CVD[J]. Thin Solid Films, 2002, 416(1): 41 | [21] | P. Smereka, X. Q. Li, G. Russo, et al, Simulation of faceted film growth in three dimensions: Microstructure, morphology and texture[J]. Acta Mater, 2005, 53(4): 1191 | [22] | E. S Machlin., Materials science in microelectronics[M]. New York: Giro Press, 1995 |
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