Influence of Helium-Related Defects on Hydrogen Retention in Nano-Polycrystalline Tungsten Films

doi:10.11901/1005.3093.2013.763

Chinese Journal of Materials Research

2014, Vol. 28

Issue (5): 333-338 DOI: 10.11901/1005.3093.2013.763

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Influence of Helium-Related Defects on Hydrogen Retention in Nano-Polycrystalline Tungsten Films

Sha XIE¹,Aihong DENG^1,^2,^**(

),Kang WANG¹,Ling WANG²,Yue LI1,Yong WANG¹,Yuan WANG²

1. College of Physical Science and Technology, Sichuan University, Chengdu 610064
2. Key Laboratory for Radiation Physics and Technology of Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064

Cite this article:

Sha XIE,Aihong DENG,Kang WANG,Ling WANG,Yue LI,Yong WANG,Yuan WANG. Influence of Helium-Related Defects on Hydrogen Retention in Nano-Polycrystalline Tungsten Films. Chinese Journal of Materials Research, 2014, 28(5): 333-338.

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Abstract

The influence of helium-related defects on hydrogen retention in magnetron sputtered nano-polycrystalline tungsten films, which had been sequentially irradiated by high energy helium and hydrogen ions, was investigated by means of X-ray diffraction (XRD), scanning electron microscope (SEM), elastic recoil detection (ERD) and slow positron beam analysis (SPBA). The results show that the helium ion implanted tungsten films would transform from β-W to α-W after annealing. After annealing at 873 K the release of helium atoms increased dramatically, while the open-volume defects and the degree of structural disorders in the films increased. Furthermore, the total retention of hydrogen in tungsten films decreased slightly with the decreasing of helium content.

Key words: metallic materials magnetron sputtered tungsten films SPBA hydrogen helium

Received: 16 October 2013

Fund: *Supported by National Natural Science Foundation of China No.11275132.

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	Sha XIE
	Aihong DENG
	Kang WANG
	Ling WANG
	Yue LI
	Yong WANG
	Yuan WANG

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https://www.cjmr.org/EN/10.11901/1005.3093.2013.763 OR https://www.cjmr.org/EN/Y2014/V28/I5/333

Fig.1 SEM photographs of tungsten films, cross-sectional photograph of pure tungsten film (a), surface morphologies of 723K annealed (b) and 873K annealed (c, d)

Fig.2 XRD patterns of the H⁺ implanted tungsten films under different temperature isochronal annealing after He⁺irradiation, unannealed (A), 473 K annealed (B), 723 K annealed(C), 873 K annealed (D) and only H⁺(E)

Fig.3 ERD patterns of helium in the H⁺implanted tungsten films under different temperature annealing after He⁺ irradiation (a), ERD patterns of hydrogen in the H⁺ implanted tungsten films under different temperature annealing after He⁺ irradiation (b), Average He and H concentrations in the H⁺ implanted tungsten films under different temperature annealing after He⁺ irradiation (c)

Fig.4 Low-(S) momentum annihilation fractions as a function of the positron energy of the H⁺ implanted tungsten films under different temperature isochronal annealing after He⁺ irradiation (The solid line are the fitting results of VEPFIT program)

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