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Micro-morphology and Preferential Growth of ZrB2 Coating Prepared by Chemical Vapor Deposition |
Jun ZHANG,Lei ZHANG,Guodong LI( ),Xiang XIONG |
State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China |
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Cite this article:
Jun ZHANG,Lei ZHANG,Guodong LI,Xiang XIONG. Micro-morphology and Preferential Growth of ZrB2 Coating Prepared by Chemical Vapor Deposition. Chinese Journal of Materials Research, 2017, 31(3): 168-174.
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Abstract ZrB2 coating was deposited on graphite by chemical vapor deposition with ZrCl4-BCl3-H2-Ar as reaction ingredient at different temperatures, which then was characterized by means of X-ray diffractometer and scanning electron microscopy (SEM). The results show that the formation of ZrB2 coating on graphite follows a mode of nucleation of ZrB2 first, which grow as islets and then further grow and merger each other forming a complete film. The growing and merging of islets resulted in that a large number of holes existed in the coating side near the boundary ZrB2 coating / graphite substrate, and thereby formed the fine grain zone there. In the initial deposition stage at 1300℃ to 1600℃, the primary grains of ZrB2 coalesced to become secondary grains with preferential orientation <111>. As the deposition processed, the secondary grains changed to the plate-shaped grains. The plate-shaped grains transformed into the pyramid shaped ones with further growing, and the inner part of the coating turned to be dense columnar grains. Meanwhile the preferred orientation of the grains changed from <111> to <100>. When the edge of the pyramid shaped crystal grains passivated, the grains inside the coating transformed to equiaxed ones and correspondingly their preferred orientation changed from <100> to <101>.
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Received: 29 April 2016
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Fund: Supported by National Program on Key Basic Research Project of China (No.2011CB605805) |
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