|
|
Effect of Pulsed Bias Voltage on the Microstructures and properties of TiN/TiAlN Multilayer Coatings |
WEI Yongqiang1,2, TIAN Xiubo1, GONG Chunzhi1, YANG Shiqin1 |
1.State Key Lab of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001
2.School of Mechanical Engineering, Zhengzhou Institute of Aeronautics Industry Management, Zhengzhou 450015 |
|
Cite this article:
WEI Yongqiang TIAN Xiubo GONG Chunzhi YANG Shiqin. Effect of Pulsed Bias Voltage on the Microstructures and properties of TiN/TiAlN Multilayer Coatings. Chin J Mater Res, 2011, 25(6): 630-636.
|
Abstract TiN/TiAlN multilayer coatings were prepared by arc ion plating with different pulsed bias voltages. With the increase of pulsed bias voltage, the amounts of the macroparticles were largely reduced. The increase of the pulsed bias voltage caused the decrease of Al/Ti atom ratio. The multilayer coatings exhibited growth in preferred orientation of (111) plane with the grain size ranging from 8nm to 14nm. The hardness of TiN/TiAlN multilayer coatings was over 36GPa, which was 3.9 times that of M2 high speed substrate. All the adhesion strength of TiN/TiAlN multilayer coatings was more than 60 N. All the TiN/TiAlN multilayer coatings showed better wear resistance.
|
Received: 19 April 2011
|
|
Fund: Supported by National Nature Science Foundation of China Nos.10905013 & 10975041. |
1 O.Knotek, M.Bohmer, T.Leyendecker, On structure and properties of sputtered Ti and Al based hard compound films, J. Vac. Sci. Technol. A, 4(6), 2695–2700(1986)2 S.Paldey, S.C.Deevi, Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review, Mater. Sci. Eng. A, 342(1–2), 58–79(2003)3 L.Y.Zheng, L.X.Zhao, W.H.Xiong, Tribological properties of TiAlN-coated cermets, Rare Met., 28(1), 57–62(2009) 4 PAN Xiaolong, WANG Shaopeng, LI Zhengxian, WANG Baoyun, YAN Peng, JI Shouchang, Huang Chunliang, High temperature behavior of TiAlN coating prepared by arc ion plating on TC4 titanium alloy, Rare Metal Materials and Engineering, 37(S4), 598–601(2008)(潘晓龙, 王少鹏, 李争显, 王宝云, 严鹏, 姬寿长, 黄春良, 钛合金表面电弧离子镀TiAlN涂层的耐高温性能, 稀有金属材料与工程, 37(S4), 598--601(2008))5 PAN Xiaolong, WANG Shaopeng, LI Zhengxian, HUANG Chunliang, WANG Baoyun, YAN Peng, JI Shouchang, Thermal fatigue and oxidation resistance of TiAlN coating grown by arc ion plating, Chinese Journal of Vacuum Science and Technology, 28(S1), 60–63(2008)(潘晓龙, 王少鹏, 李争显, 黄春良, 王宝云, 严鹏, 姬寿长, 电弧离子镀TiAlN涂层的热疲劳及抗氧化性能, 真空科学与技术学报, 28(S1), 60--63(2008))6 S.Paldey, S.C.Deevi, T.L.Alford, Cathodic arc deposited thin film coatings based on TiAl intermetallics, Intermetallics, 12(7–9), 985–991(2004)7 QIAO Xueliang, WU Yiping, CHEN Jianguo, SUN Peizhen, Effects of Al content on microstructures and properties of (Ti, Al)N coatings, Chinese Journal of Materials Research, 9(6), 505–507(1995)(乔学亮, 吴一平, 陈建国, 孙培祯, Al含量对(Ti,Al)N薄膜微观结构与性能的影响, 材料研究学报, 9(6), 505--507(1995)8 QIAO Xueliang, HOU Yanhong, WU Yiping, CHEN Jianguo, SUN Peizhen, Phase structure and distribution of Ti–Al–N functional gradient coatings, Chinese Journal of Materials Research, 10(3), 310–312(1996)(乔学亮, 候晏红, 吴一平, 陈建国, 孙培祯, Ti--Al--N系功能梯度薄膜的相结构, 材料研究学报, 10(3), 310--312(1996))9 FENG Changjie, XIN Li, LI Mingsheng, ZHU Shenglong, WANG Fuhui, The corrosion resistance of Ti0.7Al0.3N coating under NaCl deposit in wet oxygen at 450oC , Chinese Journal of Materials Research, 21(2), 145–150(2007)(冯长杰, 辛丽, 李明升, 朱圣龙, 王福会, Ti0.7Al0.3N涂层的抗NaCl和水蒸气腐蚀行为,江材料研究学报, 21(2), 145--150(2007))10 W.Olbrich, J.Fessmann, G.Kampschulte, J.Ebberink, Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias, Surf. Coat. Technol., 49(1–3), 258–262(1991)11 M.S.Li, S.L.Zhu, F.Wang, C.Sun, L.S.Wen, The effects of pulse bias voltage and N2 partial pressure on TiAlN films of arc ion plating(AlP), Acta Metall. Sin. -Engl., 14(6), 520–524(2001)12 G.Lin, Y.Zhao, C.Dong, L.Wen, Factors Affecting Microhardness of Ti/TiN Multilayer Films Deposited by Pulsed Bias Arc Ion Plating, Plasma Process. Polym., 4(S1), S120–S123(2007)13 ZHAO Yanhui, LIN Guoqiang, LI Xiaona, DONG Chuang, WEN Lishi, Effect of pulsed bias on microhardness of Ti/TiN multilayer films deposited by arc ion plating, Acta Metallurgica Sinica, 41(10), 1106–1110(2005)(赵彦辉, 林国强, 李晓娜, 董闯, 闻立时, 脉冲偏压对电弧离子镀Ti/TiN纳米多层薄膜显微硬度的影响, 金属学报, 41(10), 100--104(2005))14 L.S.Wen, R.F.Huang, Some fundamental problems of pulse biased arc ion plating, Surf. Coat. Technol., 193(1–3), 1–5(2005)15 WANG Baoyun, LI Zhengxian, YAN Peng, DU Jihong, Microstructures & performance of multilayer TiN/TiAlN coating on TC4 by arc ion plating, Rare Metal Materials and Engineering, 37(8), 1407–1410(2008)(王宝云, 李争显, 严鹏, 杜继红, 钛合金表面电弧离子镀TiN/TiAlN多层复合涂层的组织及性能, 稀有金属材料与工程, 37(8), 1407--1410(2008))16 ZHENG Liyun, WANG Yuguo, ZHAO Lixin, ZHANG Jingjun, XIONG Weihao, Study on the fracture toughness of TiN/TiAlN coating, Rare Metal Materials and Engineering, 37(S1), 752–755(2008)(郑立允, 王玉果, 赵立新, 张京军, 熊惟皓, TiN/TiAlN涂层的断裂韧性研究, 稀有金属材料与工程, 37(S1), 752--755(2008))17 G.Lin, Y.Zhao, H.Guo, D.Wang, C.Dong, R.Huang, L.Wen, Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition, J. Vac. Sci. Technol. A, 22(4), 1218–1222(2004)18 T.Nitter, Levitation of dust in rf and dc glow discharges, Plasma Sources Sci. Technol., 5(1), 93–111(1996)19 L.Bardos, H.Barankova, L.E.Gustavsson, Effect of substrate material and bias on properties of TiN films deposited in the hybrid plasma reactor, J. Vac. Sci. Technol. A, 24(4), 1655–1659(2006)20 D.M.Mattox, G.J.Kominiak, Structure modification by ion bombardment during deposition, J. Vac. Sci. Technol., 9(1), 528–532(1972)21 M.Zhang, G.Q.Lin, G.Y.Lu, C.Dong, K.H.Kim, Hightemperature oxidation resistant (Cr, Al)N films synthesized using pulsed bias arc ion plating, Appl. Surf. Sci., 254(22), 7149–7154(2008)22 C.Mendibide, P.Steyer, J.Fontaine, P.Goudeau, Improvement of the tribological behaviour of PVD nanostratified TiN/CrN coatings-An explanation, Surf. Coat. Technol., 201(7), 4119–4124(2006)23 X.M.Xu, J.Wang, J.An, Y.Zhao, Q.Y.Zhang, Effect of modulation structure on the growth behavior and mechanical properties of TiN/ZrN multilayers, Surf. Coat. Technol., 201(9–11), 5582–5586(2007)24 V.Uvarov, I.Popov, Metrological characterization of Xray diffraction methods for determination of crystallite size in nano–scale materials, Mater Charact, 58(10), 883–891(2007)25 A.Knutsson, M.P.Johansson, L.Karlsson, M.Oden, Thermally enhanced mechanical properties of arc evaporated Ti0.34Al0.66N/TiN multilayer coatings, J. Appl. Phys., 108(4), 044312–7(2010)26 R.Messier, A.P.Giri, R.A.Roy, Revised structure zone model for thin film physical structure, J. Vac. Sci. Technol. A, 2(2), 500–503(1984)27 X.Yu, M.Hua, C.B.Wang, Y.Liu, D.Y.Yu, S.L.Ma, Enhancing the hardness of arc–ion–plated nanocrystallite TiN films, Nanotechnology, 18(35), (2007)28 ZHANG Ping, DU Jun, TIAN Fei, CAI Zhihai, Research status quo of pulsed bias arc ion plating, Journal of Academy of Armored Force Engineering, 23(2), 71–75(2009)(张平, 杜军, 田飞, 蔡志海, 脉冲偏压离子镀的研究现状, 装甲兵工程学院学报, 23(2), 71--75(2009))29 C.M.Kao, J.W.Lee, H.W.Chen, Y.C.Chan, J.G.Duh, S.P.Chen, Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods, Surf. Coat. Technol., 205(5), 1438–1443(2010) |
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
|
Shared |
|
|
|
|
|
Discussed |
|
|
|
|