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| Effect of substrate bias on microstructure and properties of diamond-like carbon films by linear ion beam system |
| DAI Wei; WU Guosong; SUN Lili; WANG Aiying |
| Ningbo Institute of Material Technology & Engineering; Chinese Academy of Sciences; Ningbo 315201 |
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Cite this article:
DAI Wei WU Guosong SUN Lili WANG Aiying. Effect of substrate bias on microstructure and properties of diamond-like carbon films by linear ion beam system. Chin J Mater Res, 2009, 23(6): 598-603.
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Abstract A large area diamond-like carbon films were synthesized on P type Si(100) substrates, ranged in 300 mm×100 mm matrix, by an advanced linear ion beam system using the precursor gas of acetylene. Effect of substrate negative bias on the microstructure and properties of DLC films were investigated by Raman spectroscopy, stress tester and nano-indenter respectively. The tribological behavior of films was also investigated by a homemade ball-on-disk tribometer. With increasing the bias from 0 to 300 V, the G-peak position of the Raman spectra decreased firstly and then increased. A lowest value was acquired at the bias voltage of −100 V, which represented the highest sp3 fraction in the DLC films. The highest residual stress, hardness and Youngs modulus films of were also observed when the negative bias voltage was −100 V, respectively. The DLC films deposited with bias voltage 300 V showed the largest wear rate than the others.
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Received: 30 April 2009
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| Fund: Supported by the Science and Technology Department of Zhejiang Province Foundation No.2008C21055 and Ningbo Mulcinipal Foundation No.2008B10046. |
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