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| Preparation and tribological behaviour of nanostructure TiN films |
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| 1.兰州大学730000; 2.中国科学院兰州化学物理研究所固体润滑国家重点实验室 |
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Cite this article:
;. Preparation and tribological behaviour of nanostructure TiN films. Chin J Mater Res, 2004, 18(3): 280-284.
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Abstract Nano--structure TiN thin films were deposited on silicon substrate at room
temperature using filtered cathodic arc plasma (FCAP) system. The effects
of negative substrate bias on the structure and property were studied. The
microstructure and morphology of TiN thin films were characterized by AFM
and XRD. The results show that the TiN thin films deposited by FCAP are
very smooth and dense, and the grain size of the TiN ranges from
50$\sim$80 nm that increases with increasing the negative voltage.
The preferred crystalline orientation was on the denser (111) orientation,
and the friction coefficients of this kind of TiN films were lower than that of
conventional TiN films. SEM photographs of wear trace indicated that the
films were dense and macroparticle--free
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Received: 19 July 2004
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1 M.Y.A1 Jaroudi, H.T.G.Hentzell, S.Gong, Thin Solid Films, 195, 63(1991)
2 M.Stoiber, E.Badischa, C.Lugmairc, Surface And Coatings Technology, 163-164, 451(2003)
3 LIU Yukei, CAO Jnn, Vacuum & Cryogenics, 10(3) , 19(1991) (刘玉魁,曹军,真空与低温,10(3) ,19(1991) )
4 A.Matthews, A.R.Lefkow, Thin Solid Films, 126, 283(1985)
5 J.E.Daalder, J. Phys. D: Appl. Phys., 9, 2379(1976)
6 I.Konyashin, G.Fox-Rabinovich, A.Dodonov, J. Materials Science, 32, 6029(1997)
7 HAN Xiuxun, YAN Pengxun, YAN Fengyuan, LIU Weimin, YU Huayang, XU Jianwei, WU Zhiguo, Tribol-ogy, 22, 175(2002) (韩修训,阎鹏勋,闫逢元,刘维民,余画洋,徐建伟,吴志国,摩擦学学报,22,175(2002) )
8 A.Anders, R.A.Macgill, Surf. Coat. Technol., 133-134, 96(2000)
9 D.R.Mckenzie, Y.Yin, W.D.Mcfall, N.H.Hoang, J. Phys.: Condens.Matter, 8(32) , 5883(1996)
10 U.C.Oh, Jung Ho Je, J. Appl. Phys., 3, 74(1993)
11 Joshua Pelleg, L.Z.Zevin, S. Lungo, Thin solid film, 197, 117(1991) |
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