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| 高功率脉冲磁控溅射ZrN纳米薄膜制备及性能研究 |
| 吴忠振, 田修波, 段伟赞, 巩春志, 杨士勤 |
| 哈尔滨工业大学现代焊接生产技术国家重点实验室 哈尔滨 150001 |
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| Fabrication and Surface Properties of ZrN Films by High Power Pulsed Magnetron Sputtering |
| WU Zhongzhen, TIAN Xiubo, DUAN Weizan, GONG Chunzhi, YANG Shiqin |
| State Key Lab of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001 |
引用本文:
吴忠振 田修波 段伟赞 巩春志 杨士勤. 高功率脉冲磁控溅射ZrN纳米薄膜制备及性能研究[J]. 材料研究学报, 2010, 24(6): 561-566.
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Fabrication and Surface Properties of ZrN Films by High Power Pulsed Magnetron Sputtering[J]. Chin J Mater Res, 2010, 24(6): 561-566.
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