PECVD法制备类金刚石薄膜的摩擦学性能

材料研究学报

2011, Vol. 25

Issue (1): 73-78

研究论文

本期目录 | 过刊浏览

PECVD法制备类金刚石薄膜的摩擦学性能

王庆良, 孙彦敏, 张磊

中国矿业大学材料科学与工程学院徐州 221116

Tribological Properties of Diamond– like Carbon Films Deposited by PECVD

WANG Qingliang, SUN Yanmin, ZHANG Lei

School of Material Science and Engineering, China University of Mining & Technology, Xuzhou 221116

引用本文:

王庆良孙彦敏张磊. PECVD法制备类金刚石薄膜的摩擦学性能[J]. 材料研究学报, 2011, 25(1): 73-78.
, , . Tribological Properties of Diamond– like Carbon Films Deposited by PECVD[J]. Chin J Mater Res, 2011, 25(1): 73-78.

全文: PDF(1272 KB)

摘要: 采用射频等离子体增强化学气相沉积法(rf--PECVD), 在45钢表面沉积了类金刚石(DLC)薄膜, 借助激光拉曼光谱仪(Raman)、X射线光电子能谱(XPS)、扫描电子显微镜(SEM)和原子力显微镜(AFM), 分析了DLC膜的键结构、表面形貌和结构特征, 用原位纳米力学测试系统测定了薄膜的硬度。以GCr15钢为摩擦副材料, 用UMT--Ⅱ摩擦磨损实验机考察了不同载荷和滑行速度条件下DLC膜的摩擦磨损性能, 并分析了磨损机理。结果表明, 在45钢表面沉积的薄膜具有典型的类金刚石薄膜的结构特征, 薄膜表面由致密的纳米级颗粒组成, 具有较高的硬度。在各种摩擦磨损实验条件下DLC薄膜表现出良好的抗磨损性能, 摩擦系数均明显比45钢的低, 尤其在高速低载下摩擦系数低至0.008。

关键词 ：材料表面与界面, 等离子增强化学气相沉积, 类金刚石膜, XPS, 摩擦磨损

Abstract：Diamond–like carbon (DLC) films were prepared on the surface of 45 steel substrates by the radio–frequency plasma enhanced chemical vapor deposition (rf–PECVD) technique. The bond structure, surface morphology and microstructure of DLC film were characterized with a laser Raman spectroscopy (Raman), X–ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscope (AFM). The hardness of DLC film was determined by the tribo–indenter in − situ nano–mechanical test system. Tribological behaviors of DLC film against GCr15 steel were performed using a UMT– friction and wear tester under the various normal loads and sliding speeds. And the wear mechanisms were also analyzed. The experimental results showed that the thin film deposited on the surface of 45 steel has the typical structural characteristics of DLC film. The surface of DLC film composes of the compact nano–particles, which has the higher hardness than that of the 45 steel substrates. Under the different tribological conditions, DLC film showed the higher wear–resistance and lower friction coefficient compared with the 45 steel substrates. Especially in the high–speed and low–load conditions, the friction coefficient was lower than 0.008.

Key words： surface and interface in the materials PECVD diamond–like carbon films XPS friction and wear

收稿日期: 2010-10-13

ZTFLH:

TB383

基金资助:

国家重点基础研究发展计划2007CB607605,清华大学摩擦学国家重点实验室开放基金SKLTKF08A01资助项目。

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