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Chin J Mater Res  2009, Vol. 23 Issue (6): 640-645    DOI:
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Three dimensional Monte Carlo model of thin film growth
ZHU Yiguo
Supported by the National Basic Research Program under the Grant 2005CB321704.
Cite this article: 

ZHU Yiguo. Three dimensional Monte Carlo model of thin film growth. Chin J Mater Res, 2009, 23(6): 640-645.

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Abstract  

The morphology of thin film growth has been investigated using 3D Monte Carlo model. Three kinds of dynamic process, i.e. adsorption, diffusion and revaporation are considered independently. Each of the three processes will happen in one Monte Carlo step according to their rate. In the processes of deposition and diffusion, the finial position of atom is the Non-Null position of the next layer. The results show that the thin film growth mode is determined by interaction energy between two atoms of thin film, deposition rate and temperature.

Key words:  foundational discipline in materials science       thin film growth       3D Monte Carlo model       growth mode       morphology     
Received:  20 November 2008     
ZTFLH: 

O484

 
Fund: 

Supported by the National Basic Research Program under the Grant 2005CB321704.

URL: 

https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y2009/V23/I6/640

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