Chin J Mater Res  1997, Vol. 11 Issue (5): 511-514    DOI:

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INFRARED FILTER FABRICATION BY ION BEAM ASSISTED DEPOSITION OF Si_3N_4 / Si FILMS

JIANG Bingyao ;ZHANG Fumin; SUN Yilin; CHEN Youshan; LIU Xianghuai(Ion Beam Laboralory; Shanghai Institute of Metallurgy; CAS)

JIANG Bingyao ;ZHANG Fumin; SUN Yilin; CHEN Youshan; LIU Xianghuai(Ion Beam Laboralory; Shanghai Institute of Metallurgy; CAS). INFRARED FILTER FABRICATION BY ION BEAM ASSISTED DEPOSITION OF Si_3N_4 / Si FILMS. Chin J Mater Res, 1997, 11(5): 511-514.

Abstract References Related Articles Recommended Metrics Download:  PDF(353KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Infrared filter was fabricated by ion beam assisted deposition of Si3N4/ Si films on the Si substrate. The experiments found that the N2+N+ ion assisted bom-bardment is the key of synthesis Si3N4 films. Strong peaks were found in the infrared reflection s Key words:  infraed filter ion beam assisted deposition Correspondent JIANG Bingyao      Ion Beam Laboratory      Shanghai Institute of Matellurgy      CAS      Shanghai 200050      Received:  25 October 1997      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1997/V11/I5/511 1. J.F.Ziegler, J.P.Biersack, U.Littmerk. The Stopping and Raners of Ions in Solids Vol.l of Seriest Stopping andRanges of Ions in Mater(New York, Pergamon Press, 1985) 2. H.J.Erler, G.Reisse, C.Weissmantel, Thin Solid Films. 65, 233(1980) 3. D.K.Brice, Nucl.Instr. and Meth. B17, 289(1986) 4. G.Q.Yang, B.Y.Jiang, Wei Zhou, X.H.Liu, S.C.Zou, Nucl. Instr. and Meth. B37 / 38, 424(1989) [1] MIAO Qi, ZUO Xiaoqing, ZHOU Yun, WANG Yingwu, GUO Lu, WANG Tan, HUANG Bei. Pore Structure, Mechanical and Sound Absorption Performance for Composite Foam of 304 Stainless Steel Fiber/ZL104 Aluminum Alloy[J]. 材料研究学报, 2023, 37(3): 175-183. [2] HOU Yutong, LI Xin, LI Dawei, WEI Qufu. Preparation of Immobilized Laccase onto Framework-like Material of Metal-organic Compound and Its Degradation for Catechol[J]. 材料研究学报, 2022, 36(10): 793-800. [3] JIANG Jufu, WANG Ying, XIAO Guanfei, DENG Teng, LIU Yingze, ZHANG Ying. Influence of Modification, Refinement and Heat Treatment on Mechanical Properties of A356 Al-alloy Components Prepared by Squeeze Casting[J]. 材料研究学报, 2020, 34(12): 881-891. [4] CHEN Xianming, PAN Qinglin, FAN Yingying. Precipitation of Al3(Scx ,Ti1-x) Particles in Al-Mg-Sc-Ti Alloy[J]. 材料研究学报, 2020, 34(10): 737-743. [5] WANG Bin,HE Yanping,WANG Haojie,TIAN Yong,JIA Tao,WANG Bingxing,WANG Zhaodong. Vacuum Low-pressure Carburization of Gear Steel 16Cr3NiWMoVNbE for Aviation[J]. 材料研究学报, 2020, 34(1): 35-42. [6] Tuo ZHANG,Lvdan TENG,Qiyu ZANG,Yitao YANG. Friction and Wear Behavior of Niobium Alloyed Medium Chromium Wear-resistant Cast Steel[J]. 材料研究学报, 2019, 33(4): 313-320. [7] Yue WU,Jianping LI,Zhong YANG,Yongchun GUO,Zhijun MA,Minxian LIANG,Tong YANG,Dong TAO. Creep Behavior of a High Strength Compacted Graphite Cast Iron[J]. 材料研究学报, 2019, 33(1): 43-52. [8] Xiuhong KANG, Xiaoqiang HU, Leigang ZHENG, Lijun XIA. Effect of Cr/Ni Equivalent Ratio on Microstructure and Properties of Austenitic Stainless Steel CAP1400 for Reactor Coolant Pump Casing[J]. 材料研究学报, 2018, 32(2): 142-148. [9] QIN Fangcheng, LI Yongtang. Evolution of Grain Orientation and Texture of Ring Shaped Blank Induced by Hot Compression During Casting-rolling Process[J]. 材料研究学报, 2016, 30(7): 509-516. [10] Lintao CHEN Wenge HOU,Yingbin LIU,Qiwen LUO. Analyses on Connection Characteristics of Composites of Steel-Copper[J]. 材料研究学报, 2015, 29(9): 693-700. [11] Zhigang YANG,Jianbo YU,Chuanjun LI,Kang DENG,Zhongming REN,Yunbo ZHONG,Qiuliang WANG,Yinming DAI,Hui WANG. Effect of Sintering Conditions on Texture Formation of Si3N4 Ceramic Shaped up in a Strong Magnetic Field[J]. 材料研究学报, 2015, 29(5): 371-376. [12] Jian ZHAO,Chunlei YI. Optimization of Investment Casting Process for Stainless Steel Impeller with Complicated Geometry[J]. 材料研究学报, 2015, 29(12): 955-960. [13] Shue DANG,Zhanning SU,Zhilong LIU,Yan HE,Zhen ZHAO,Yan LIU. Austenite Grain Growth Behavior During Heating Process of As-cast 30Cr2Ni4MoV Steel[J]. 材料研究学报, 2014, 28(9): 675-681. [14] Dandan TIAN,Guoqiu HE,Yue SHEN,Xiaoshan LIU,Kangle FAN,Defeng MO. Effect of Loading Path on Fatigue Behavior of A319 Cast Aluminum Alloy[J]. 材料研究学报, 2014, 28(10): 756-762. [15] YUAN Yongli, HE Guoqiu, FAN Kangle, LIU Xiaoshan, ZHU Minhao. Low Cycle Fatigue Behavior of Gray Cast Iron Used for Engine[J]. 材料研究学报, 2013, 27(5): 469-476. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed