尺度对金属材料电阻率影响的研究进展<sup>*</sup>

doi:10.11901/1005.3093.2013.365

材料研究学报

2014, Vol. 28

Issue (2): 81-87 DOI: 10.11901/1005.3093.2013.365

本期目录 | 过刊浏览

尺度对金属材料电阻率影响的研究进展^*

张广平¹(

),李孟林¹,吴细毛²,李春和²,罗雪梅¹

1. 中国科学院金属研究所沈阳材料科学国家(联合)实验室沈阳 110016
2. 辽宁省电力有限公司电力科学研究院沈阳 110006

Research Progress on Effect of Length Scale on Electrical Resistivity of Metals

Guangping ZHANG^1,^**(

),Menglin LI¹,Ximao WU²,Chunhe LI²,Xuemei LUO¹

1. Shenyang National Laboratory for Materials Science, Institute of Metal Research, ChineseAcademy of Sciences, Shenyang 110016
2. Northeast Electric Power Research Institute, Liaoning Electric Co., LTD, Shenyang 110006

引用本文:

张广平,李孟林,吴细毛,李春和,罗雪梅. 尺度对金属材料电阻率影响的研究进展^*[J]. 材料研究学报, 2014, 28(2): 81-87.
Guangping ZHANG, Menglin LI, Ximao WU, Chunhe LI, Xuemei LUO. Research Progress on Effect of Length Scale on Electrical Resistivity of Metals[J]. Chinese Journal of Materials Research, 2014, 28(2): 81-87.

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摘要:

随着微/纳米技术的发展, 在微/纳尺度器件中金属材料的几何尺度或微观结构尺度从宏观尺度逐渐减小到微米、亚微米甚至纳米量级, 其室温电阻率往往表现出明显的尺寸效应。本文总结了近年来关于不同尺度金属材料电阻率的研究进展, 重点介绍了金属材料的微观结构、缺陷尺度以及几何尺度对金属材料电阻率的影响及相关的理论模型, 探讨了材料内部微观结构尺度与几何尺度对材料导电性能的影响规律。最后, 对微尺度金属材料电阻率及其服役可靠性的研究趋势进行了展望。

关键词 ：材料科学基础学科, 电阻率, 综述, 尺寸效应, 微观结构, 微尺度

Abstract：

With the development of micro/nano-technologies, microstructural scales or geometrical dimensions of metal conductors in the micro/nano-devices are becoming shrunk from macroscopic scale to micron scale, submicron scale and even nanometer scale, leading to the fact that the electrical resistivity of metal conductors at room temperature tends to exhibit evident size effects. Recent studies on the electrical resistivity of metal conductors at different length scales were reviewed in this paper, focusing on the effects of the geometrical scales of microscalematerials and of the scale of microstructures and defects in the materials as well as the relevant theoretical models. Finally the developing tendency of the investigations on the electrical resistivity of metal conductors and the service reliability of the microscale metals in the future are also addressed.

Key words： foundational discipline in materials science electrical resistivity reviews size effect microstructure microscale

收稿日期: 2013-05-31

基金资助:* 国家电网公司总部科技和科技部“973”计划2010CB631003 资助项目。

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图1 工业纯铜电阻率和电导率随着ARB道次的变化规律[30]

图2 影响金属材料电阻率各个因素的示意图

图3 几种金属薄膜电阻率随膜厚度的变化规律[39]

图4 Cu/Ta多层膜电阻率随单层膜厚度变化规律以及FS模型、MS模型和FS-MS模型对Cu/Ta多层膜电阻率的计算结果[26]

图5 纯铜电导率与材料尺度(几何尺度和微观结构尺度)间的关系

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