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材料研究学报  2011, Vol. 25 Issue (1): 89-94    
  研究论文 本期目录 | 过刊浏览 |
(Ti, Al, Zr)N多元氮梯度硬质反应膜的组织结构和性能
吕会敏1, 张钧1,2
1.沈阳大学机械工程学院 沈阳 110044
2.大连理工大学三束材料改性教育部重点实验室 大连 116024
Microstructure and Properties of (Ti, Al, Zr)N Multi–components Hard Reactive Films with N–gradient Distributions
L¨U Huimin1, ZHANG Jun 1,2
1.College of Mechanical Engineering, Shenyang University, Shenyan 110044
2. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams Ministry of Education, Dalian University of Technology, Dalian 116042
引用本文:

吕会敏 张钧. (Ti, Al, Zr)N多元氮梯度硬质反应膜的组织结构和性能[J]. 材料研究学报, 2011, 25(1): 89-94.
, . Microstructure and Properties of (Ti, Al, Zr)N Multi–components Hard Reactive Films with N–gradient Distributions[J]. Chin J Mater Res, 2011, 25(1): 89-94.

全文: PDF(1118 KB)  
摘要: 采用多弧离子镀技术和Ti--Al合金靶及Zr单质靶的组合, 在高速钢基体上制备了(Ti,Al,Zr)N多元N梯度硬质反应膜。分别用扫描电镜、X射线衍射仪观察测定(Ti, Al, Zr)N梯度膜膜层的表面、断面形貌、成分以及相结构, 研究了(Ti, Al, Zr)N多元氮梯度硬质反应膜的组织结构和性能。结果表明, 与TiN、(Ti, Al)N、(Ti,Zr)N及(Ti, Al, Zr)N等单层硬质膜相比, 采用Ti--Al合金靶及单质Zr靶组合方式制备的(Ti, Al, Zr)N多元氮梯度硬质反应膜具有较高的硬度和膜/基附着力, 硬度最高可达HV6000, 膜/基附着力大于180 N。同时, 膜层还具有良好的抗热震性能。
关键词 材料表面与界面(Ti, Al, Zr)N膜多弧离子镀显微硬度热震    
Abstract:(Ti, Al, Zr)N multi–component hard films with N–gradient distributions were prepared by multi arc ion plating (MAIP) technology using the combined pure Zr and Ti–Al alloy targets. The surface and cross–fracture morphology, the surface compositions and the phase structure of the as–deposited films were observed and measured. The effects of bias voltage on the film quality, phase structure, the micro–hardness, the adhesion between film and substrate and the thermal shock resistance were investigated. In comparison with TiN, (Ti, Al)N and (Ti, Zr)N films, the as–deposited (Ti,Al,Zr)N films from the combination of pure Zr and Ti–Al alloy targets exhibited higher micro–hardness values even up to HV6000. Each of the as–deposited films has very high adhesion strength, in terms of critical load, larger than 180 N. The good heat shock resistance was also reached for each of the as–deposited films.
Key wordssurface and interface in the materials     (Ti, Al, Zr)N films    multi–arc ion plating    micro–hardness    thermal shock
收稿日期: 2010-09-21     
ZTFLH: 

O484

 
基金资助:

辽宁省高等学校优秀人才支持计划RC--05--05及沈阳市科技计划1091178--1--00资助项目。

1 L.A.Dobrza´nki, L.W. ˙Z kowska, J.Mikula, K.Golombek, D.Pakul, M.Pancielejko, Structure and mechanical properties of gradient PVD coatings, Journal of Materials Processing Technology, 201(1–3), 310(2008)

2 WEN Lishi, HUANG Rongfang, New progress in TiN–based protective coatings deposited by arc ion plating, Vacuum, (1), 1(2000)

(闻立时, 黄荣芳, 离子镀硬质膜技术的最新进展和展望, 真空, (1), 1(2000))

3 CAO Meng, LI Qiang, DENG Xiangyun, LI Dejun, Effect of ion bombarding energy on the properties of ZrN/TiAlN nanometer multilayered coatings, Chinese Journal of Materials Research, 21(6), 627(2007)

(曹猛, 李强, 邓湘云, 李德军, 离子轰击能量对ZrN/TiAlN纳米多层膜性能的影响, 材料研究学报,  21(6), 627(2007))

4 J.C.Oliveria, A.Manaia, Hard amorphous Ti–Al–N coatings deposited by sputtering, Thin Solid Film, 516(15), 5032(2008)

5 V.V.Uglov, V.M.Anishchik, S.V.Zlotski, I.D.Feranchuk, T.A.Alexeeva, A.Ulyanenkov, J.Brechbuehl, A.P.Lazar, Composition and phase stability upon annealing of gradient nitride coatings, Surface and Coatings Technology, 202(11), 2389(2008)

6 Jun Zhang, Wengying Guo, Yu Zhang, Qiang Guo, Chuang Wang, Lipeng Zhang, Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating, Thin Solid Films, 517(17), 4830(2009)

7 CUI Guanying, ZHANG Jun, LV Huimin, Microstructure and properties of (Cr, Ti, Al, Zr)N multi-component super-hard gradient films deposited by multi-arc ion plating, Journal of Materials Protection, 43(6), 24(2010)

(崔贯英, 张钧, 吕会敏, 多弧离子镀(Cr, Ti, Al, Zr)N多组元超硬梯度膜的结构及性能, 材料保护, 43(6), 24(2010))

8 ZHANG Haoyang, ZHOU Lanying, TIAN Jianchao, Effect of substrate–bias on the characteristic of tiain coatings, Surface Technology, 35(6), 15(2006)

(张皓扬, 周兰英, 田建朝, 基体偏压对TiAlN涂层性能的影响, 表面技术,  35(6), 15(2006))

9 A.Rizzo, M.A.Signore, M.F.De Riccardis, L.Capodieci, D.Dimaio, T.Nocco, Influence of growth rate on the structural and morphological properties of TiN, ZrN and TiN/ZrN multilayers, Thin Solid Films, 515(17), 6665(2007)

10 G.Abadias. Stress and preferred orientation in nitride–based PVD coatings, Surface and Coatings Technology, 202(11), 2223(2008)

11 Youn J.Kim, Ho Y.Lee, Tae J.Byun, Jeon G.Han, Microstructure and mechanical properties of TiZrAlN nanocomposite thin films by CFUBMS, Thin Solid Films, 516(11), 3651(2008)

12 A.Hoerling, J.Sj¨ol´en, H.Willmann, T.Larsson, M.Od´en, T.Larsson, M.Od´en, L.Hultman. Thermal stability, microstructure and mechanical properties of Ti1−xZrxN thin films, Thin Solid Films, 516(18), 6421(2008)

13 YANG Honggang, LI Shu, ZHANG Ronglu, Influence of bias voltage and N2 partial pressure on structure of TiN film and performance of film/substrate, China Surface Engineering, 22(2), 20(2009)

(杨洪刚, 李曙, 张荣禄, 偏压和氮分压对TiN膜层结构和膜/基体系性能的影响, 中国表面工程,  22(2), 20(2009))

14 Jong–Keuk Park, Young–Joon Baik. Increase of hardness and thermal stability of TiAlN coating by nanoscale multi–layered structurization with a BN phase, Thin Solid Films, 516(11), 3661(2008)

15 PAN Xiaolong, WANG Shaopeng, LI Zhengxian, HUANG Chunliang, WANG Baoyun, YAN Peng, JI Shouchang, Thermal fatigue and oxidation resistance of TiAlN coating grown by arc ion plating, Journal of Vacuum Science and Technology, 28(S), 60(2008)

(潘晓龙, 王少鹏, 李争显, 黄春良, 王宝云, 严鹏, 姬寿长, 电弧离子镀TiAlN涂层的热疲劳及抗氧化性能, 真空科学与技术学报,  28(增刊), 60(2008))
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