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CVD金刚石薄膜的成核机制 |
汪浩;朱鹤孙;沈明荣;宁兆元 |
北京理工大学;北京理工大学;苏州大学;苏州大学 |
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REVIEW ON THE NUCLEATION MECHANISM OF DIAMOND FILMS BY CHEMICAL VAPOR DEPOSITION |
WANG Hao;ZHU Hesun;SHEN Mingrong;NING Zhaoyuan(Beijing Institute of Technology) (Suzhou University) |
引用本文:
汪浩;朱鹤孙;沈明荣;宁兆元. CVD金刚石薄膜的成核机制[J]. 材料研究学报, 1998, 12(6): 570-574.
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REVIEW ON THE NUCLEATION MECHANISM OF DIAMOND FILMS BY CHEMICAL VAPOR DEPOSITION[J]. Chin J Mater Res, 1998, 12(6): 570-574.
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