Chin J Mater Res  1992, Vol. 6 Issue (3): 236-240    DOI:

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MICROSTRUCTURE AND OPTICAL PROPERTIES OF THE AIN FILMS DEPOSITED BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING

WANG Hao;HUANG Rongfang;HONG Ruijiang;WU Jie;WEN Lishi(Institute of Metal Research;Academia Sinica)

WANG Hao;HUANG Rongfang;HONG Ruijiang;WU Jie;WEN Lishi(Institute of Metal Research;Academia Sinica). MICROSTRUCTURE AND OPTICAL PROPERTIES OF THE AIN FILMS DEPOSITED BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING. Chin J Mater Res, 1992, 6(3): 236-240.

Abstract References Related Articles Recommended Metrics Download:  PDF(586KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Microstructure,crystallography,electron structure and optical properties ofaluminum nitride film deposited by ion beam enhanced reactive magnetron sputtering were stu-died.The results show that the microstructure of the film is uniform and the grain size Key words:  thin films      AIN      magnetron sputtering      Received:  25 June 1992      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1992/V6/I3/236 1 Roman Y G,Adriaansen A P M.Thin Solid Films,1989;169:241 2 Hantzpergue J J,Pauleau Y,Remy J C et al.Thin Solid Films,75;75:167 3 Aita C R.J Appl Phys,1982;53(3) :1807 4 Takaoka H,Ishikawa J,Takagi T.Thin Solid Films,1988;157:143 5 Yim W M,Stofko E J,Zanzucchi P J et al.J Appl Phys,1973;44(1) :292 6 Shiosaki T,IEEE Trans,Sonics Ultrason,1982;29(3) :174 7 Duffy M T,Wang C C,Zanzucchi P J.J Eletron Meter,1973;2(2) :359 8 MacMahon R,Affinito J,Parsons R.J Vac Sci Technol,1982;20:376 9 Heavens O S.Thin Film Physics.London Methuen:1970:1 10 Hecht E,Zajac.Optics Cambridge Adison-wesley,MA,1980:1 11 KaKmoto K.Infrared and Raman Spectra of Inorganic and coordination compounds.John Wiley,1978: [1] ZHAO Zhengxiang, LIAO Luhai, XU Fanghong, ZHANG Wei, LI Jingyuan. Hot Deformation Behavior and Microstructue Evolution of Super Austenitic Stainless Steel 24Cr-22Ni-7Mo-0.4N[J]. 材料研究学报, 2023, 37(9): 655-667. [2] CHEN Jingjing, ZHAN Huimin, WU Hao, ZHU Qiaolin, ZHOU Dan, LI Ke. Tensile Mechanical Performance of High Entropy Nanocrystalline CoNiCrFeMn Alloy[J]. 材料研究学报, 2023, 37(8): 614-624. [3] WANG Hao, CUI Junjun, ZHAO Mingjiu. Recrystallization and Grain Growth Behavior for Strip and Foil of Ni-based Superalloy GH3536[J]. 材料研究学报, 2023, 37(7): 535-542. [4] LIU Tao, YIN Zhiqiang, LEI Jingfa, GE Yongsheng, SUN Hong. Plastic Deformation Behavior of Selective Laser Melting 316L Stainless Steel under High Strain Rate Compression[J]. 材料研究学报, 2023, 37(5): 391-400. [5] JIANG Shuimiao, MING Kaisheng, ZHENG Shijian. A Review on Grain Boundary Segregation, Interfacial Phase and Mechanical Property Adjusting-controlling for Nanocrystalline Materials[J]. 材料研究学报, 2023, 37(5): 321-331. [6] JIANG Menglei, DAI Binbin, CHEN Liang, LIU Hui, MIN Shiling, YANG Fan, HOU Juan. Effect of Building Dimensions by Selective Laser Melting on Pitting Properties of 304L Stainless Steel[J]. 材料研究学报, 2023, 37(5): 353-361. [7] YANG Baolei, LIU Tingguang, SU Xianglin, FAN Yu, QIU Liang, LU Yonghao. Effect of Thermal Aging on Mechanical Properties and Intergranular Corrosion Resistance of 316LN[J]. 材料研究学报, 2023, 37(5): 381-390. [8] DONG Yu'ang, YANG Huajie, BEN Dandan, MA Yunrui, ZHOU Xianghai, WANG Bin, ZHANG Peng, ZHANG Zhefeng. Excellent Cryogenic Tensile Properties of Ultra-fine Grained 316L Stainless Steel after Electropulsing Treatment in Liquid Nitrogen[J]. 材料研究学报, 2023, 37(3): 168-174. [9] MIAO Qi, ZUO Xiaoqing, ZHOU Yun, WANG Yingwu, GUO Lu, WANG Tan, HUANG Bei. Pore Structure, Mechanical and Sound Absorption Performance for Composite Foam of 304 Stainless Steel Fiber/ZL104 Aluminum Alloy[J]. 材料研究学报, 2023, 37(3): 175-183. [10] QIAN Chunhua, CUI Haitao, WEN Weidong. Investigation on Thermo-mechanical Fatigue Behavior of GH4169 Alloy[J]. 材料研究学报, 2023, 37(2): 145-151. [11] YAN Chunliang, GUO Peng, ZHOU Jingyuan, WANG Aiying. Electrical Properties and Carrier Transport Behavior of Cu Doped Amorphous Carbon Films[J]. 材料研究学报, 2023, 37(10): 747-758. [12] ZHANG Yutuo, ZOU Hao, WANG Pei, LIU Gongmei. Effect of Molybdenum on Mechanical Properties of ZG04CR13Ni4Mo Stainless Steel[J]. 材料研究学报, 2023, 37(1): 65-69. [13] SHAN Weiyao, WANG Yongli, LI Jing, XIONG Liangyin, DU Xiaoming, LIU Shi. High Temperature Oxidation Resistance of Cr Based Coating on Zirconium Alloy[J]. 材料研究学报, 2022, 36(9): 699-705. [14] ZOU Tianchun, JU Yuezhang, LI Longhui, FU Ji. Effect of Stacking Sequences on Bonding Performance of CFRP-Al Single-lap Joint[J]. 材料研究学报, 2022, 36(9): 715-720. [15] NING Bo, LI Zhichao, WU Huibin, ZHANG Bingjun, HUANG Manli, DING Chao. Mechanism of Improving Low Temperature Impact Toughness of 09MnNi Vessel Steel[J]. 材料研究学报, 2022, 36(9): 660-666. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed