Chin J Mater Res  1992, Vol. 6 Issue (4): 315-319    DOI:

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CHARACTERIZATION OF DLC FILMS PREPARED BY DUAL-ION BEAM SPUTTERING DEPOSITION

WANG Weijie;WANG Tianmin;HAN Peigang(Lanzhou University)LUO Chongtai;HUANG Liangfu;LIU Dingquan(Physics Research Institute of Lanzhou;Chinese A cademy of Space Technology)

WANG Weijie;WANG Tianmin;HAN Peigang(Lanzhou University)LUO Chongtai;HUANG Liangfu;LIU Dingquan(Physics Research Institute of Lanzhou;Chinese A cademy of Space Technology). CHARACTERIZATION OF DLC FILMS PREPARED BY DUAL-ION BEAM SPUTTERING DEPOSITION. Chin J Mater Res, 1992, 6(4): 315-319.

Abstract References Related Articles Recommended Metrics Download:  PDF(427KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Using dual-ion beam sputtering deposition method,DLC films were depositedon glass and silicon substrate under different CH_4 flow ratios(CH_4/(CH_4+Ar)from 0% to100%)in bombarding ion source.The structures and the properties of the films were systemati-ca Key words:  Dual-ion beam sputtering deposition      DLC films      thin film growth      structure      properties      Received:  25 August 1992      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1992/V6/I4/315 1 Tsai H C,Bogy D B.J Vac Sci Technol,1987;A5(6) :3287 2 林树汉,刘国洪.材料科学进展,1987;1(4) :13 3 王天民等.薄膜科学与技术,1990;3(2) :45 4 王维洁等.光学学报,1990;10(12) :1118 5 Kitabatake M,Wasa K.J Appl Phys,1985;58(4) :1693 6 Dillon R O,Woollam J A,Karkanan V.Phys Rev,1984;29(6) :3482 7 Savvides N,Window B.J Vac Sci Technol,1985;A3(6) :238 [1] PAN Xinyuan, JIANG Jin, REN Yunfei, LIU Li, LI Jinghui, ZHANG Mingya. Microstructure and Property of Ti / Steel Composite Pipe Prepared by Hot Extrusion[J]. 材料研究学报, 2023, 37(9): 713-720. [2] MAO Jianjun, FU Tong, PAN Hucheng, TENG Changqing, ZHANG Wei, XIE Dongsheng, WU Lu. Kr Ions Irradiation Damage Behavior of AlNbMoZrB Refractory High-entropy Alloy[J]. 材料研究学报, 2023, 37(9): 641-648. [3] ZHAO Zhengxiang, LIAO Luhai, XU Fanghong, ZHANG Wei, LI Jingyuan. Hot Deformation Behavior and Microstructue Evolution of Super Austenitic Stainless Steel 24Cr-22Ni-7Mo-0.4N[J]. 材料研究学报, 2023, 37(9): 655-667. [4] XING Dingqin, TU Jian, LUO Sen, ZHOU Zhiming. Effect of Different C Contents on Microstructure and Properties of VCoNi Medium-entropy Alloys[J]. 材料研究学报, 2023, 37(9): 685-696. [5] OUYANG Kangxin, ZHOU Da, YANG Yufan, ZHANG Lei. Microstructure and Tensile Properties of Mg-Y-Er-Ni Alloy with Long Period Stacking Ordered Phases[J]. 材料研究学报, 2023, 37(9): 697-705. [6] XIONG Shiqi, LIU Enze, TAN Zheng, NING Likui, TONG Jian, ZHENG Zhi, LI Haiying. Effect of Solution Heat Treatment on Microstructure of DZ125L Superalloy with Low Segregation[J]. 材料研究学报, 2023, 37(8): 603-613. [7] QIN Heyong, LI Zhentuan, ZHAO Guangpu, ZHANG Wenyun, ZHANG Xiaomin. Effect of Solution Temperature on Mechanical Properties and γ' Phase of GH4742 Superalloy[J]. 材料研究学报, 2023, 37(7): 502-510. [8] FENG Ye, CHEN Zhiyong, JIANG Sumeng, GONG Jun, SHAN Yiyin, LIU Jianrong, WANG Qingjiang. Effect of a NiCrAlSiY Coating on Cyclic Oxidation and Room Temperature Tensile Properties of Ti65 Alloy Plate[J]. 材料研究学报, 2023, 37(7): 523-534. [9] WANG Wei, XIE Zelei, QU Yishen, CHANG Wenjuan, PENG Yiqing, JIN Jie, WANG Kuaishe. Tribological Properties of Graphene/SiO2 Nanocomposite as Water-based Lubricant Additives[J]. 材料研究学报, 2023, 37(7): 543-553. [10] SHI Chang, DU Yuhang, LAI Liming, XIAO Siming, GUO Ning, GUO Shengfeng. Mechanical Properties and Oxidation Resistance of a Refractory Medium-entropy Alloy CrTaTi[J]. 材料研究学报, 2023, 37(6): 443-452. [11] LEI Zhiguo, WEN Shengping, HUANG Hui, ZHANG Erqing, XIONG Xiangyuan, NIE Zuoren. Influence of Rolling Deformation on Microstructure and Mechanical Properties of Al-2Mg-0.8Cu(-Si) Alloy[J]. 材料研究学报, 2023, 37(6): 463-471. [12] ZHANG Tengxin, WANG Han, HAO Yabin, ZHANG Jiangang, SUN Xinyang, ZENG You. Damping Enhancement of Graphene/Polymer Composites Based on Interfacial Interactions of Hydrogen Bonds[J]. 材料研究学报, 2023, 37(6): 401-407. [13] WANG Wei, PENG Yiqing, DING Shijie, CHANG Wenjuan, GAO Yuan, WANG Kuaishe. Tribological Properties of Graphite-based Solid Lubricating Coatings for Ti-6Al-4V Alloy at 500~800oC[J]. 材料研究学报, 2023, 37(6): 432-442. [14] XIA Bo, WANG Bin, ZHANG Peng, LI Xiaowu, ZHANG Zhefeng. Effect of Tempering Temperature on Microstructure and Impact Properties of Two High-strength Leaf Spring Steels[J]. 材料研究学报, 2023, 37(5): 341-352. [15] JIANG Shuimiao, MING Kaisheng, ZHENG Shijian. A Review on Grain Boundary Segregation, Interfacial Phase and Mechanical Property Adjusting-controlling for Nanocrystalline Materials[J]. 材料研究学报, 2023, 37(5): 321-331. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed