POLYCRYSTALLINE Al_2O_3 FILM PREPARED BY IBAD

Chin J Mater Res

1993, Vol. 7

Issue (6): 521-525 DOI:

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POLYCRYSTALLINE Al_2O_3 FILM PREPARED BY IBAD

WANG Chen;YANG Jie;FAN Yudian;TAO Kun(Tsinghua University)

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WANG Chen;YANG Jie;FAN Yudian;TAO Kun(Tsinghua University). POLYCRYSTALLINE Al_2O_3 FILM PREPARED BY IBAD. Chin J Mater Res, 1993, 7(6): 521-525.

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Abstract Alumina films were prepared by electron beam evaperation from α-Al_2O_3 with10 keV or 20 keV argon ion bombardment.The temperature of substrates was maintained atroom temperature(RT)or 300℃.The structure and topography were investigated by XRD,XPS,TEM and

Key words: ion beam assisted deposition γ-Al_2O_3 thin film

Received: 25 December 1993

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