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Chin J Mater Res  1989, Vol. 3 Issue (2): 160-164    DOI:
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THE ION BEAM INDUCED PHASE TRANSFORMATION IN UNLIMITED SUPPLY SYSTEMS OF METAL AND SILICON
MAO Sining YANG Xihong CHEN Jian LIU Jiarui GAO Wenyu YANG Feng (Beijing University) (Institute of Physics;Academia Sinica)
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MAO Sining YANG Xihong CHEN Jian LIU Jiarui GAO Wenyu YANG Feng (Beijing University) (Institute of Physics;Academia Sinica). THE ION BEAM INDUCED PHASE TRANSFORMATION IN UNLIMITED SUPPLY SYSTEMS OF METAL AND SILICON. Chin J Mater Res, 1989, 3(2): 160-164.

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Abstract  Five metal-silicon systems (Ni/Si,Cu/Si,Ti/Si,Nb/Si,Mo/Si) were chosen for this experiment and the results in a verity of condi-tions were summarized.The phase transformation by ion beam induced isnon-equilibrium process.This process might change the comp
Key words:  ion beam mixing      metal/silicon system      phase transformation      thin film transformation     
Received:  25 April 1989     
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