He Plasma Assisted Preparation of Nanostructure Tungsten Materials

doi:10.11901/1005.3093.2015.775

Chinese Journal of Materials Research

2017, Vol. 31

Issue (6): 415-421 DOI: 10.11901/1005.3093.2015.775

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He Plasma Assisted Preparation of Nanostructure Tungsten Materials

Zhiling HAO,Hongyu FAN,Jiayu GUO(

),Tingting HU,Meng LI,Hejing CUI,Bixuan ZHANG

School of Physics and Materials Engineering, Dalian Nationalities University, Dalian 116600, China

Cite this article:

Zhiling HAO,Hongyu FAN,Jiayu GUO,Tingting HU,Meng LI,Hejing CUI,Bixuan ZHANG. He Plasma Assisted Preparation of Nanostructure Tungsten Materials. Chinese Journal of Materials Research, 2017, 31(6): 415-421.

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Abstract

Nanostructure tungsten materials were successfully prepared by He plasma assisted methods. The effects of ions fluences and discharge power on the surface morphology of tungsten were investigated. Scanning electron microscopy and tapping mode atomic force microscopy were used to characterize the sample topography and surface roughness under different discharge condition. At the discharge power of 6 kW and ion energy of 220 eV, it showed that the tungsten surface formed the nano pinhole structure and then the pore size gradually increased with increasing ion fluences. When the ion fluence increased to 1.0×10²⁶ ionsm^-2, the sample surface formed nano tungsten fuzz. The cross section analysis also showed that the nano structure layer thickness increases with the increase of irradiation ion flunece. High-resolution scanning electron microscope analysis found that there are a large number of nanoHe bubble at the interface of tungsten fuzz root and tungsten bulk, which gives the direct evidence that the tungsten fuzz forming is derived from He bubble. This work is of great significance for the further understanding the formation mechanism of nano tungsten fuzz.

Key words: metallography nano structured tungsten irradiation He bubble

Received: 31 October 2016

Fund: Supported by National Natural Science Foundation of China (No.11405023), Scientific Research Project of Education Department of Liaoning Province (No.L2014539), Natural Science Foundation of Liaoning Province (No.201602189), National College Students Innovation Training Project of China (No.G201512026043) and “Taiyangniao” Student Research Project of Dalian Nationalities University (No.tyn2016404)

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	Zhiling HAO
	Hongyu FAN
	Jiayu GUO
	Tingting HU
	Meng LI
	Hejing CUI
	Bixuan ZHANG

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https://www.cjmr.org/EN/10.11901/1005.3093.2015.775 OR https://www.cjmr.org/EN/Y2017/V31/I6/415

Fig.1 SEM surface analysis of W after irradiated at He⁺fluence of (a) 1.0×10²⁵ ionsm^-2; (b) 3.1×10²⁵ ionsm^-2; (c) 6.2×10²⁵ ionsm^-2 and (d) 1.0×10²⁶ ionsm^-2 with 6 kW discharge power

Fig.2 The surface pore distribution of W sample irradiated at He⁺fluence of (a) 1.0×10²⁵ ionsm^-2; (b) 3.1×10²⁵ ionsm^-2and (c) 6.2×10²⁵ ionsm^-2 with 6 kW discharge power

Fig.3 SEM cross section analysis of W after irradiated at He⁺fluence of (a) 1.0×10²⁵ ionsm^-2; (b) 3.1×10²⁵ ionsm^-2; (c) 6.2×10²⁵ ionsm^-2 and (d) 1.0×10²⁶ ionsm^-2 with 6 kW discharge power

Fig.4 Surface RMS values (a) and nano-stucture height (b) of W sample as a function of He ion irradiation fluencies

Fig.5 surface analysis of W after irradiated at discharge power of (a) 3 kW and (b) 8 kW

Fig.6 High-resolution SEM image of W sample irradiated at 1.0×10²⁶ ionsm^-2 He ions fluence with 6 kW discharge power

Fig.7 A schematic representation of the formation process of W nanostuctured layer via He plasma irradiation

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